US3702923A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Die sorting system
Assignee: Teledyne Inc
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Filing: 1970-11-27
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Granted: 1972-11-14
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Expires: 1990-11-27
Abstract
Abstract A wafer of semiconductor devices is tested to determine the quality of each device. The test data with respect to each die is electro-optically encoded and photographically recorded in a pattern corresponding to the die pattern on the wafer. Upon completion of the testing and recording operations the wafer is scored, mounted on a flexible pressure sensitive adhesive web and broken so as to separate the dies from one another while maintaining their original orientation. The dice and their respective test record are then mounted on a common frame, side by side, so that each die and its test data are readily matched. The frame is then mounted on a die sorting mechanism comprised of an XY indexing table which indexes the wafer die by die through a removal station and the film indexed through an electro-optical reader where the test data is read out to designate the die to a selected delivery station.
Inventors
- 👤 Mordechai Wiesler
- 👤 Virgil Martinonis
- 👤 John S Macintyre
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:46
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; B; B07; B07C; B07C5/00; B07C5/34; B07C5/344; G01R31/2893
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
169 words
An electro-optical decoder comprising: a. film mounting means adapted to receive a film having a coded image thereon; b. lens means focused on said film; c. beam splitter means mounted in registration with said lens means along the optical axis thereof; d. firSt and second tube means extending from said beam splitter means, the longitudinal axis of said first tube means in registration with said optical axis, the longitudinal axis of said second tube means mutually perpendicular to the longitudinal axis of said first tube means, said first tube means providing visual alignment of said film; e. light source means for projecting said coded image on said film through said first and second tubes means via said lens means, said light source means disposed along said optical axis, said film disposed between said light source means and said lens means; and f. means mounted to said second tube means for receiving said projected coded image and for converting said received coded image into electrical signals representing said coded image.
Claim 2
Dependent Claim
169 words
An electro-optical decoder comprising: a. film mounting means adapted to receive a film having a coded image thereon; b. lens means focused on said film; c. beam splitter means mounted in registration with said lens means along the optical axis thereof; d. firSt and second tube means extending from said beam splitter means, the longitudinal axis of said first tube means in registration with said optical axis, the longitudinal axis of said second tube means mutually perpendicular to the longitudinal axis of said first tube means, said first tube means providing visual alignment of said film; e. light source means for projecting said coded image on said film through said first and second tubes means via said lens means, said light source means disposed along said optical axis, said film disposed between said light source means and said lens means; and f. means mounted to said second tube means for receiving said projected coded image and for converting said received coded image into electrical signals representing said coded image.
Claim 3
Dependent Claim
22 words
The electro-optical decoder as claimed in claim 1 wherein said receiving and converting means includes at least two banks of photo diodes.
Claim 4
Dependent Claim
31 words
The electro-optical decoder as claimed in claim 1 including indexing means operatively connected to said film mounting means for engaging and selectively moving said film with respect to said optical axis.
Claim 5
Dependent Claim
28 words
The electro-optical decoder as claimed in claim 3 including positioning means operatively connected to said lens means for controlling alignment between said lens means and said coded images.
Claim 6
Dependent Claim
26 words
The electro-optical decoder as claimed in claim 3 wherein said indexing means is an X Y table adapted to be driven in accordance with predetermined instructions.
Claim 7
Dependent Claim
18 words
The electro-optical decoder as claimed in claim 5 wherein said film mounting means is mounted on said table.
Claim 8
Dependent Claim
143 words
An electro-optical decoder comprising: a. film mounting means adapted to receive a film having a coded image thereon; b. optical means focused on said film; c. at least first and second tube means extending from said optical means, the longitudinal axis of said first tube means in registration with an optical axis of said optical means, the longitudinal axis of said second tube means mutually perpendicular to the longitudinal axis of said first tube means; d. first means disposed along said optical axis for projecting said coded image on said film through said first and second tube means, said first tube means providing visual alignment of said film; and e. second means mounted to said second tube means for receiving said coded image projected through said second tube means and for converting said received coded image into electrical signals representing said coded image.
Claim 9
Dependent Claim
143 words
An electro-optical decoder comprising: a. film mounting means adapted to receive a film having a coded image thereon; b. optical means focused on said film; c. at least first and second tube means extending from said optical means, the longitudinal axis of said first tube means in registration with an optical axis of said optical means, the longitudinal axis of said second tube means mutually perpendicular to the longitudinal axis of said first tube means; d. first means disposed along said optical axis for projecting said coded image on said film through said first and second tube means, said first tube means providing visual alignment of said film; and e. second means mounted to said second tube means for receiving said coded image projected through said second tube means and for converting said received coded image into electrical signals representing said coded image.
Claim 10
Dependent Claim
53 words
The electro-optical decoder as claimed in claim 7 including: a. indexing means operatively connected to said film mounting means for engaging and selectively advancing said film with respect to said optical axis; and b. positioning means operatively connected to said optical means for controlling alignment between said optical means and said coded images.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-11-14 | 1976-05-15 | 1976-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-11-14 | 1980-05-15 | 1980-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-11-14 | 1984-05-15 | 1984-11-14 | $7700.00 | Window Closed / Lapsed |