Multilayer antireflective absorption film
Abstract
Abstract A MULTILAYER ANTIREFLECTIVE ABSORPTION MASK COMPRISING A TRANSPARENT SUBSTRATE HAVING A FIRST LAYER OF OXIDIZED CHROMIUM WITH THE THICKNESS ADAPTED TO SELECTIVELY ABSORB REFLECTED RADIATION THAT WOULD BE SENSED BY THE EYE (E.G., 5000 TO 6000 ANGSTROMS); A LAYER OF CHROMIUM MASKING MATERIAL HAVING A THICKNESS ADAPTED TO ASORB RADIATION THAT WOULD EXPOSE A PHOTORESIST (E.G., 3000 TO 6000 ANGSTROMS) AND A SECOND LAYER OF OXIDIZED CHROMIUM HAVING A THICKNESS ADAPTED TO SELECTIVELY ABSORB REFLECTED RADIATION THAT WOULD EXPOSED A PHOTORESIST (E.G., 35000 TO 4500 ANGSTROMS). THE LIGHT OTHERWISE REFLECTED AND TRANSMITTED THROUGH THE SUBSTRATE IS SELECTIVELY ABSORBED BY THE FIRST LAYER OF OXIDIZED CHROMIUM AND THE NONREFLECTED TRANSMITTED LIGHT IS ABSORBED BY THE LAYER INTERPOSED BETWEEN THE TWO OXIDIZED CHROMIUM LAYERS. LIGHT THAT REACHES A REFLECTOR, VIA TRANSPARENT AREAS OF THE MULTILAYERED MASK (SUCH AS A SEMICONDUCTOR DEVICE WITH A PHOTO-RESIST THEREON) THAT IS REFLECTED THEREBY, IS SELECTIVELY ABSORBED BY THE SECOND OXIDIZED CHROMIUM LAYER.
Inventors
- 👤 Eugene R Blome
Bibliographic Details
Claims Analysis
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-17 | 1976-04-17 | 1976-10-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-17 | 1980-04-17 | 1980-10-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-17 | 1984-04-17 | 1984-10-17 | $7700.00 | Window Closed / Lapsed |