US3695886A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High speed azide resists
Assignee: International Business Machines Corp
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Filing: 1970-09-29
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Granted: 1972-10-03
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Expires: 1990-09-29
Abstract
Abstract LIGHT SENSITIVE PHOTORESIST COMPOSITIONS PARTICULARLY USEFUL FOR PROJECTION EXPOSURE APPLICATIONS INCLUDE A PHOTOCROSSLINKABLE POLYMER AND NOVEL SENSITIZERS WHICH ARE BISP-AZIDO CINNAMYLIDENE DERIVATIVES OF CYCLIC AND LINEAR KETONES.
Inventors
- 👤 Nicholas J Clecak
- 👤 Robert J Cox
- 👤 Wayne M Moreau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:25
CPC Classifications
C; C07; C07C; C07C247/00; G; G03; G03F; G03F7/00; G03F7/004; G03F7/008
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-03 | 1976-04-03 | 1976-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-03 | 1980-04-03 | 1980-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-03 | 1984-04-03 | 1984-10-03 | $7700.00 | Window Closed / Lapsed |