US3695217A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition apparatus
Assignee: Linde Sverige AB
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Filing: 1970-06-11
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Granted: 1972-10-03
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Expires: 1990-06-11
Abstract
Abstract The vapor deposition apparatus includes a horizontally disposed, continuously rotating disc having a plurality of packets spaced about the periphery thereof, each containing a different evaporant source. Means directly heat only a portion of an annulus of said disc, including at least a portion of only one of said pockets. The disc has a thermal inertia such that sufficient heat is retained at all pockets, which have passed out of the immediate influence of said heat means, whereby to effect a simultaneous evaporation from all pockets.
Inventors
- 👤 Jan Roland Jacobsson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
133 words
An apparatus for coating by vapor deposition comprising a vacuum chamber; a continuously rotating, horizontally disposed, disc support for material to be evaporated; said disc including a plurality of pockets about the periphery thereof whereby to support a plurality of different materials to be evaporated; means to directly heat only a portion of an annulus of said disc and including at least a portion of only one of said pockets within said annulus; said disc having a thermal inertia such that it maintains sufficient heat to simultaneously evaporate said plurality of different materials including the material in each of said pockets which are out of the immediate influence of said means to heat; and substrate support means disposed above and on a common axis with said disc whereby to effect said vapor deposition.
Claim 2
Independent Claim
133 words
An apparatus for coating by vapor deposition comprising a vacuum chamber; a continuously rotating, horizontally disposed, disc support for material to be evaporated; said disc including a plurality of pockets about the periphery thereof whereby to support a plurality of different materials to be evaporated; means to directly heat only a portion of an annulus of said disc and including at least a portion of only one of said pockets within said annulus; said disc having a thermal inertia such that it maintains sufficient heat to simultaneously evaporate said plurality of different materials including the material in each of said pockets which are out of the immediate influence of said means to heat; and substrate support means disposed above and on a common axis with said disc whereby to effect said vapor deposition.
Claim 3
Dependent Claim
36 words
An apparatus according to claim 1, wherein the heat means comprises an electron beam source, and magnetic and electrostatic means for deflecting and directing the electrons towards the surface of the source substance to be evaporated.
Claim 4
Dependent Claim
43 words
An apparatus according to claim 2, wherein the means for deflecting the electrons are constructed to direct the electron beam towards parts of a pocket at different radial distances from the axis of the disc whereby different proportions of evaporant composition are obtained.
Claim 5
Dependent Claim
29 words
An apparatus according to claim 1, including at least two of said means to heat said two means being placed at different positions along the circumference of the disc.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-03 | 1976-04-03 | 1976-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-03 | 1980-04-03 | 1980-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-03 | 1984-04-03 | 1984-10-03 | $7700.00 | Window Closed / Lapsed |