US3692499A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Crystal pulling system
Assignee: Texas Instruments Inc
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Filing: 1970-08-31
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Granted: 1972-09-19
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Expires: 1990-08-31
Abstract
Abstract THERE IS DISCLOSED A NEW METHOD AND APPARATUS FOR THE CONTROLLED PULLING OF CRYSTAL RODS FOR USE IN SEMICONDUCTOR COMPONENT MANUFACTURING. CHANGES IN THE DIAMETER OF THE CRYSTAL ROD ARE MONITORED BY OPTO-ELECTRICALLY DETECTING CHANGES IN THE PHYSICAL LOXATION OF A HALO SURROUNDING THE ROD AT AN INTERFACE BETWEEN THE ROD AND THE MOLTEN MATERIAL FROM WHICH IT CRYSTALLIZES. A LINEAR ELECTRICAL SIGNAL IS PRODUCED BY A MONITORING DEVICE FOR USE IN CONTROLLING THE PARAMETERS AFFECTING CRYSTAL DIAMETER DURING THE PULLING PROCESS. AN ELECTRICAL SIGNAL PROPORTIONAL TO CHANGES IN THE LEVEL OF THE MOLTEN MATERIAL WITHIN THE CRUCIBLE IS ALSO PRODUCED BY THE MONITORING DEVICE.
Inventors
- 👤 Dmetro Andrychuk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:41
CPC Classifications
C; C30; C30B; C30B15/00; C30B15/20; C30B15/22; C30B15/26; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1032
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-09-19 | 1976-03-20 | 1976-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-09-19 | 1980-03-20 | 1980-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-09-19 | 1984-03-20 | 1984-09-19 | $7700.00 | Window Closed / Lapsed |