US3691053A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Getter-sputtering apparatus
Assignee: Bangor University
•
Filing: 1969-12-29
•
Granted: 1972-09-12
•
Expires: 1989-12-29
Abstract
Abstract Apparatus and method for getter-sputtering. Material is sputtered from a cathode onto a substrate at a low pressure in an inert atmosphere. Sputtering is effected in a sputter space to which there is access of gas only by way of a gettering antechamber while sputtering is taking place. The sputter space may be arranged co-axially within the gettering space either in a planar arrangement or an arrangement of co-axial chamber with a dividing wall. Alternatively, the gettering chamber may be arranged above the sputter chamber.
Inventors
- 👤 David W F James
- 👤 David O Spiller
- 👤 Harvey D Coltman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 15:18
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; C23C14/34; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-09-12 | 1976-03-13 | 1976-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-09-12 | 1980-03-13 | 1980-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-09-12 | 1984-03-13 | 1984-09-12 | $7700.00 | Window Closed / Lapsed |