US3690966A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing microstructures
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1970-03-31
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Granted: 1972-09-12
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Expires: 1990-03-31
Abstract
Abstract A METHOD OF MANUFACTURING A MICROSTRUCTURE WHICH COMPRISES FORMING A SUBSTANCE LAYER ON THE SURFACE OF A WORKPIECE, WORKING SAID SUBSTANCE LAYER INTO A DESIRED CONFIGURATION DURING OR AFTER SAID FORMATION THEREOF, CHANGING THE COMPOSITION OF A PORTION OF THE SAID SURFACE LAYER 7, SAID SURFACE LAYER HAVING A HOLE IN THE PORTION OF SAID SURFACE LAYER WHOSE COMPOSITION HAS BEEN CHANGED, REMOVING THE REMAINDER OF SAID SUBSTANCE LAYER PREVIOUSLY FORMED THROUGH SAID HOLE, AND UTILIZING AS A PROCESSING MEANS THE PORTION OF SAID SURFACE LAYER OF CHANGED COMPOSITION, ADJACENT TO SAID WORKPIECE.
Inventors
- 👤 Yutaka Hayashi
- 👤 Yasuo Tarui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:51
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10N; H10N97/00; H10P; H10P14/00; H10P14/40; H10P14/46; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/051; Y10S148/053; Y10S148/106; Y10S438/00; Y10S438/942; Y10S438/944
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-09-12 | 1976-03-13 | 1976-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-09-12 | 1980-03-13 | 1980-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-09-12 | 1984-03-13 | 1984-09-12 | $7700.00 | Window Closed / Lapsed |