Apparatus and method for continuously condensing metal vapor upon a substrate
Abstract
Abstract APPARATUS AND METHOD FOR CONTINOUSLY CONDENSING METAL VAPOR UPON A MOVING SUBSTRATE INCLUDES GENERATING A CONTINUOUS QUANTITY OF METAL VAPOR, WHICH MAY BE AT NONTURBULENT FLOW. THE METAL VAPOR IS DIRECTED BY A NOZZLE FROM THE METAL VAPORIZING APPARATUS TOWARD THE SUBSTRATE AT TURBULENT FLOW. A CHAMBER IN WHICH THE SUBSTRATE CONTINUOUSLY MOVES COMMUNICATES WITH THE NOZZLE SO AS TO RECEIVE FROM THE NOZZLE THE METAL VAPOR TO BE DEPOSITED UPON THE SUBSTRATE. THE CHAMBER AND THE NOZZLE ARE MAINTAINED AT A TEMPERATURE EQUAL TO OR IN EXCESS OF THE TEMPERATURE OF THE METAL VAPOR TO PREVENT SUBSTANTIAL DEPOSITION OF THE VAPOR UPON THE WALLS OF THE NOZZLE AND THE CHAMBER. THE SUBSTRATE IS AT A TEMPERATURE SUBSTANTIALLY LESS THAN THAT OF THE METAL VAPOR. THE FLOW OF METAL VAPOR MAY BE CONTROLLED BY A VALVE IN THE NOZZLE WHICH DIVIDES EXCESS VAPOR FROM THE FLOW AND DIRECTS THE EXCESS VAPOR INTO A COLLECTOR BOX.
Inventors
- 👤 Frank J Cole
Bibliographic Details
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