Method of making a luminescent diode

Abstract

Abstract A METHOD OF MAKING A LUMINESCENT DIODE INCLUDING USING GALLIUM PHOSPHIDE SUBSTRATE AND A MELT OF GALLIUM PHOSPHIDE. THE SUBSTRATE AND THE MELT ARE DISPOSED IN A FIRST BOAT WITHIN A FUSED QUARTZ TUBE. THE BOAT IS INCLINED IN SUCH A MANER THAT THE MELT IS KEPT SEPARATE FROM THE SUBSTRATE. A SECOND BOAT IS PROVIDED WITHIN THE TUBE AND GALLIUM PLUS GALLIUM TRIOXIDE IS PLACED IN THE SECOND BOAT. FIRST AND SECOND FURNACES ARE PROVIDED ABOUT THE TUBE IN THE VICINITY OF THE RESPECTIVE BOATS. THE GALLIUM PLUS GALLIUM TRIOXIDE FORMS GALLIUM MONOXIDE WHEN HEATED. A CARRIER GAS SUCH AS NITROGEN IS PASSED THROUGH THE TUBE AND CARRIES THE GALLIUM MONOXIDE INTO THE VICINITY OF THE BOAT CONTAINING THE MELT OF GALLIUM PHOSPHIDE, AS A RESULT, THE OXYGEN BECOMES DOPED INTO THE MELT. THE TUBE IS THEN INCLINED IN SUCH A WAY AS TO CAUSE THE MELT TO EXTEND OVER THE SUBSTRATE AND FORM AN EPITAXIAL GROWTH UPON COOLING. THE SUBSTRATE CONTAINS AN N TYPE IMPURITY SUCH AS TELLURIUM, AND DURING THE GROWTH OF THE EPITAXIAL LAYER, A VAPOR CONTAINING A P TYPE MATERIAL SUCH AS ZINC IS ADDED INTO THE LAYER TO FORM A PN JUNCTION. IN THIS WAY, IMPROVED DOPING OF OXYGEN INTO THE JUNCTION WHICH IS REQUIRED FOR A LUMINESCENT DIODE IS ACHIEVED.

Inventors

• 👤 Masasi Dosen
• 👤 Kunio Kaneko
• 👤 Naozo Watanabe

Bibliographic Details