Alignment fixture

Claim 2

An alignment device for aligning a wafer on which microcircuits are to be formed with a mask containing the outline of the microcircuits comprising a base; said base supporting wafer carrying means for relative movement therebetween; means mounted on said base and in engagement with said wafer carrying means for moving said wafer carrying means relative to the mask so that alignment indicia on the mask and the wafer can be brought into coincidence; said moving means comprising first lever means pivotally mounted to said base and having one end coupled to said wafer carrying means; first extensible means mounted on said base and in engagement with a second end of said first lever means so that extension thereof against said second end causes translation of said wafer carrying means in a first direction, biasing means mounted on said base for urging said second end into engagement with said extensible means; said moving means further comprising second and third means mounted on said base and being coupled to said wafer carrying means, second and third extensible means mounted on said base in engagement with each of said second and third means so that extension thereof causes translation of said wafer carrying means in a second direction that is substantially perpendicular to said first direction, and biasing means mounted on said base for urging said second and third means into engagement with said second and third extensible means.

Claim 3

An alignment device as defined in claim 1 wherein said second and third means comprises second and third lever means, each being pivoted to said base and being in mutually facing relation to each other, each of said second and third lever means having one end coupled to said wafer carrying means in diametrically opposed positions, said second and third extensible means mounted on said base for respectively engaging the other ends of said second and third lever means, and said first lever means and said second lever means are coupled to said wafer carrying means at a common point so that rotation of said third lever means about its pivot causes said wafer carrying means to rotate about said common point.

Claim 4

An alignment device as defined in claim 2 wherein said lever means are coupled to said wafer carrying means by relatively slender, elongated resilient members that are fixed to said wafer carrying means and said ends of each lever means.

Claim 5

An alignment device as defined in claim 3 wherein said resilient members are comprised of wire.

Claim 6

An alignment device as defined in claim 4 wherein said ends of said first, second and third lever means that are coupled to said wires are angularly disposed with respect to said other eNds so that all of said lever means substantially surround said wafer carrying means to provide a compact device.

Claim 7

An alignment device as defined in claim 2 wherein each of said lever means is coupled to said wafer carrying means by pin and slot connections so that movement of each of said lever means about their pivots causes said pins to move in said slots and said wafer carrying means to move relative to said base.

Claim 8

An alignment device as defined in claim 2 wherein said common point comprises first pin means on said wafer carrying means, and said first and second lever means have slots engaging said first pin means.

Claim 9

An alignment device as defined in claim 7 wherein said other point comprises second pin means depending from said wafer carrying means, said third lever means includes a slot engaging said second pin means.

Claim 10

An alignment device as defined in claim 8 wherein said first and second pin means include bearing flanges, said first pin includes at least two axially spaced flanges for respective engagement with said first and second lever means and said second pin includes at least one flange for engagement with said third lever means.

Claim 11

An alignment device as defined in claim 9 wherein said ends of said first, second and third lever means that include said slots are angularly disposed with respect to said other ends so that all of said lever means substantially surround said wafer carrying means to provide a compact device.

Claim 12

An alignment device for aligning a wafer on which microcircuits are to be formed with a mask containing the outline of the microcircuits comprising a base; said base supporting wafer carrying means for relative movement therebetween; said wafer carrying means having two diametrically opposed coupling points; means mounted on said base and in engagement with said wafer carrying means for moving said wafer carrying means relative to the mask so that alignment indicia on the mask and the wafer can be brought into coincidence; said moving means comprising first, second and third levers pivotally mounted to said base, said first and second levers each having one end connected to one of said coupling points and said third lever having one end connected to said other coupling point, extensible micrometers mounted on said base and in engagement with the second ends of said levers so that extension thereof against said second ends causes movement of said wafer carrying means, means connected to each of said second ends for urging it into engagement with its respective extensible micrometer; said second and third levers being mounted on said base in mutually facing relation to each other and having their first ends coupled to said wafer carrying means in diametrically opposed positions; and said ends of said first, second and third levers that are coupled to said wafer carrying means are angularly disposed with respect to said other ends so that all of said lever substantially surround said wafer carrying means to provide a compact device.

Claim 13

An alignment device for aligning a wafer on which microcircuits are to be formed with a mask containing the outline of the microcircuits comprising a base; said base supporting wafer carrying means for relative movement therebetween; said wafer carrying means having two diametrically opposed coupling points; means mounted on said base and in engagement with said wafer carrying means for moving said wafer carrying means relative to the mask so that alignment indicia on the mask and the wafer can be brought into coincidence; said moving means comprising first, second and third levers pivotally mounted to said base, said first and second levers each having one end connected to one of said coupling points and said third lever having one end connected to said other coupling point, extensible micrometers mounted on said base and in engagement with the second ends of said levers so that extension thereof against said second ends causes movement of said wafer carrying means, means connected to each of said second ends for urging it into engagement with its respective extensible micrometer; said second and third levers being mounted on said base in mutually facing relation to each other and having their first ends coupled to said wafer carrying means in diametrically opposed positions; and said ends of said first, second and third levers that are coupled to said wafer carrying means are angularly disposed with respect to said other ends so that all of said lever substantially surround said wafer carrying means to provide a compact device.