Tensometric gas and liquid pressure sensing element

Claim 2

A tensometric pressure sensing element, comprising a main circular diaphragm, at least two smaller diaphragms formed by circular recesses in the said main diaphragm, and resistors arranged in a bridge circuit arrangement on each of the said smaller diaphragms.

Claim 3

A tensometric pressure sensing element as claimed in claim 1 wherein the main circular diaphragm is made of a semiconductor material, and the resistors on the said smaller diaphragms are formed thereon by diffusion.

Claim 4

A tensometric pressure sensing element as claimed in claim 2 wherein the said at least two smaller diaphragms are arranged on the edge of the said main diaphragm, one axis of the said smaller diaphragms coincides with the axis of the said main diaphragm, and the distance between the center of the said main diaphragm to the nearest place of the edge of a smaller diaphragm is a least 0.58 of the radius of the said main diaPhragm.

Claim 5

A tensometric sensing element as claimed in claim 2 comprising a first and a third resistor on a first smaller diaphragm, and a first and third resistor on a second smaller diaphragm located on an axis coinciding with the axis of the said main diaphragm, each of said first and third resistors being disposed on one edge of the respective smaller diaphragm, and a second and a fourth resistor of the said first smaller diaphragm, and a second and a fourth resistor on the said second smaller diaphragm, said second and fourth diaphragms being located at right angles to the said axis of the said main diaphragm near the centers of the said smaller diaphragms.

Claim 6

A tensometric sensing element as claimed in claim 3 comprising a first and a third resistor on a first smaller diaphragm, and a first and third resistor on a second smaller diaphragm located on an axis coinciding with the axis of the said main diaphragm, each of said first and third resistors being disposed on one edge of the respective smaller diaphragms, and a second and a fourth resistor of the said first smaller diaphragm, and a second and a fourth resistor on the said second smaller diaphragm, said second and fourth diaphragms being located at right angles to the said axis of the said main diaphragm near the centers of the said smaller diaphragms.

Claim 7

A tensometric sensing element as claimed in claim 2 wherein each smaller diaphragm carries four resistors, the said four resistors of each smaller diaphragm are connected in a separate bridge circuit, and the separate bridge circuits are connected in parallel.

Claim 8

A tensometric sensing element as claimed in claim 4 wherein each smaller diaphragm carries four resistors, the said four resistors of each smaller diaphragm are connected in a separate bridge circuit, and the separate bridge circuits are connected in parallel.

Claim 9

A tensometric sensing element as claimed is claim 5 wherein each smaller diaphragm carries four resistors, the said four resistors of each smaller diaphragm are connected in a separate bridge circuit, and the separate bridge circuits are connected in parallel.

Claim 10

A tensometric pressure sensing element as claimed in claim 4 wherein each of two resistors of a first of the said at least two smaller diaphragms located on the axis of the said main diaphragm is connected in series with one resistor of a second of the said at least two smaller diaphragms which is also arranged on the axis of the main diaphragm, each of two resistors of the said first smaller diaphragm arranged at right angles to the axis of the main diaphragm is connected in series with one resistor of the second smaller diaphragm which is also connected at right angles to the said axis of the said main diaphragm, and the series combination of the said two resistors form individual branches of a complex bridge.

Claim 11

A tensometric sensing element as claimed in claim 1 comprising two further recesses arranged in opposite relationship and nearer to the center of the said main diaphragm than to the said two smaller diaphragms, the said two further recesses forming a third and a fourth smaller diaphragm, respectively, the outer edges of the said third and fourth smaller diaphragms being as near as possible to an imaginary circle circumscribed from the center of the main diaphragm and substantially tangential to the inner edges of the said first and second smaller diaphragms.

Claim 12

A tensometric sensing element as claimed in claim 3 comprising two further recesses arranged in opposite relationship and nearer to the center of the said main diaphragm than the said two smaller diaphragms, the said two further recesses forming a third and a fourth smaller diaphragm, respectively, the outer edges of the said third and fourth smaller diaphragms being as near as possible to an imaginary circle circumscribed from the center of the main diaphragm and substantially tangential to the inner edges of the said first and second smaller diaphragms.

Claim 13

A tensometric sensing elEment as claimed in claim 9 comprising a separate bridge on each smaller diaphragm, each of the said separate bridges comprising resistors, and the output diagonals of the separate bridges on the said smaller diagonals being connected in series.

Claim 14

A tensometric sensing element as claimed in claim 10 comprising a separate bridge of resistors on each smaller diaphragm, and the diagonals of the said separate bridges being connected in series.