US3681226A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering process for making ferroelectric films
Assignee: International Business Machines Corp
•
Filing: 1970-07-02
•
Granted: 1972-08-01
•
Expires: 1990-07-02
Abstract
Abstract THE FABRICATION, COMPOSITION AND UTILIZATION OF SPUTTERING CATHODES OR TAGETS FOR MIXED OXIDE OR FERROELECTRIC FILMS COMPRISING TWO OR MORE METALS. SUCH CATHODES ARE MADE FROM THE BLENDED METAL POWDERS BY COMPRESSION INTO DISKS. THESE DISKS ARE SOLDERED AGAINST A METALLIC, WATER-COOLED BACKING PLATE. SPUTTERING WITH DC OR RF POWER TAKES PLACE IN A REACTIVE, SPECIFICALLY AN OXIDIZING, ATMOSPHERE.
Inventors
- 👤 Siegfried F Vogel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 06:00
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; C23C14/06; C23C14/08; C23C14/088
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-08-01 | 1976-01-31 | 1976-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-08-01 | 1980-01-31 | 1980-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-08-01 | 1984-01-31 | 1984-08-01 | $7700.00 | Window Closed / Lapsed |