US3681155A
Expired / Lapsed
US
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Aluminum diffusions
Assignee: Motorola Solutions Inc
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Filing: 1970-06-25
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Granted: 1972-08-01
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Expires: 1990-06-25
Abstract
Abstract A METHOD OF DIFFUSING ALUMINUM IS DISCLOSED. A LAYER OF ALUMINUM OXIDE ON A SEMICONDUCTOR BODY IS HEATED IN A HYDROGEN ATMOSPHERE WHEREBY ALUMINUM FROM THE ALUMINUM OXIDE DIFFUES INTO THE SEMICONDUCTOR BODY. THIS INVENTION INCLUDES THE SIMULTANEOUS DIFFUSIG OF ALUMINUM FROM THE ALUMINUM OXIDE LAYER AND A SECOND DOPANT THROUGH AN OPENING IN THE ALUMINUM OXIDE LAYER WHEREBY THE TWO DOPANTS DIFFUSE INTO THE SEMICONDUCTOR BODY.
Inventors
- 👤 Douglas L Elgan
- 👤 Robert G Hays
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:23
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/40; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6938; H10P14/6939; H10P14/69391; Y; Y10; Y10S; Y10S148/00; Y10S148/033; Y10S148/043; Y10S148/106; Y10S148/151; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-08-01 | 1976-01-31 | 1976-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-08-01 | 1980-01-31 | 1980-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-08-01 | 1984-01-31 | 1984-08-01 | $7700.00 | Window Closed / Lapsed |