US3676320A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for depositing thin films on thin elongated electrically insulating substrates
Assignee: Disa Elektronik AS
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Filing: 1970-03-13
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Granted: 1972-07-11
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Expires: 1990-03-13
Abstract
Abstract A method for depositing thin films on thin elongated, electrically insulating substrates by bias-sputtering material from two targets on to the substrates in an electrical plasma, the substrates being suspended over apertures in an electrically biased metallic substrate holder, around which is formed a dark space filling said apertures and surrounding the substrates. A thin film deposited by said method has good film adhesion, good all-over uniformity and electrical properties close to the bulk valus of the film material so as to be applicable as sensing element in sensors.
Inventors
- 👤 Orla Christensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:08
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/36; C; C03; C03C; C03C25/00; C03C25/10; C03C25/12; C03C25/22; C03C25/226; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-11 | 1976-01-10 | 1976-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-11 | 1980-01-10 | 1980-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-11 | 1984-01-10 | 1984-07-11 | $7700.00 | Window Closed / Lapsed |