US3676002A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical mask with integral spacers and method of making
Assignee: International Business Machines Corp
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Filing: 1969-06-30
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Granted: 1972-07-11
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Expires: 1989-06-30
Abstract
Abstract THIS IS AN OPTICAL MASK PRIMARILY FOR USE IN THE MANUFACTURE OF SOLID STATE SEMICONDUCTOR DEVICES. THE MASK HAS INTEGRAL SPACER PORTIONS WHICH INTIMATELY CONTACT THE SURFACE OF THE DEVICE DURING THE STAGE IN THE PROCESSING WHEN THE PHOTORESIST IS EXPOSED. THESE INTEGRAL SPACERS NOT ONLY PROTECT THE MASK DURING CONTACT WITH THE DEVICE BUT ALSO PROVIDE IMPROVED DEVICES BECAUSE OF SUPERIOR OPTICAL CHARACTERISTICS.
Inventors
- 👤 Wayne M Moreau
- 👤 Hans R Rottmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:10
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/50
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-11 | 1976-01-10 | 1976-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-11 | 1980-01-10 | 1980-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-11 | 1984-01-10 | 1984-07-11 | $7700.00 | Window Closed / Lapsed |