US3674995A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Computer controlled device testing and subsequent arbitrary adjustment of device characteristics
Assignee: Texas Instruments Inc
•
Filing: 1970-08-31
•
Granted: 1972-07-04
•
Expires: 1990-08-31
Abstract
Abstract A system for arbitrary adjustment of device characteristics to produce parameter matched arrays or to do custom design utilizes computer control. The computer is linked with electron beam scanned testing to derive individual device characteristic information such as breakdown voltage, leakage, and switching time. From such derived information the computer generates a signal back to the electron beam, increasing its current intensity to heat the device and thereby change the device''s characteristic properties. If bulk breakdown voltage is too low, for example, increased current intensity shifts the material toward n-type if done at about 500* C. in an N p diode, this would increase bulk breakdown voltage. When it reaches the predetermined (computed) level, the beam cuts off.
Inventors
- 👤 Don Leslie Kendall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:21
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/305; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/003; Y10S148/018; Y10S148/071; Y10S148/093; Y10S148/162
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
104 words
A system for the adjustment of device parameters of one or more devices of a semiconductor integrated circuit or array having a plurality of devices comprising: a. means for measuring the actual values of the respective parameters of each of said one or more devices to be adjusted, b. means for heating each of said one or more devices, and c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said heating means responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 2
Independent Claim
104 words
A system for the adjustment of device parameters of one or more devices of a semiconductor integrated circuit or array having a plurality of devices comprising: a. means for measuring the actual values of the respective parameters of each of said one or more devices to be adjusted, b. means for heating each of said one or more devices, and c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said heating means responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 3
Dependent Claim
60 words
The system of claim 1 wherein said computer meanS is comprised of: a. analog-to-digital conversion means for converting said measured actual parameter values into digital information, b. a digital computer for determining the difference between said actual parameter values and desired parameter values, and c. digital-to-analog conversion means for selectively operating said heating means in accordance with said determined differences.
Claim 4
Dependent Claim
54 words
The system of claim 1 wherein said computer means is comprised of: a. analog computer means for determining the difference between said actual parameter values and desired parameter values and for generating a signal responsive to said difference and b. control means for selectively operating said heating means in accordance with said generated signal.
Claim 5
Dependent Claim
30 words
The system of claim 1 wherein said measuring means is comprised of a test probe and said heating means is comprised of a probe for passing current through a device.
Claim 6
Dependent Claim
15 words
The system of claim 1 wherein said heating means is comprised of a laser beam.
Claim 7
Independent Claim
89 words
A system for matching device parameters of each of a plurality of semiconductor devices comprised of: a. means for measuring the actual values of the parameters to be matched for each of said devices, b. means for applying heat to each of said devices, and c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said heating means responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 8
Independent Claim
89 words
A system for matching device parameters of each of a plurality of semiconductor devices comprised of: a. means for measuring the actual values of the parameters to be matched for each of said devices, b. means for applying heat to each of said devices, and c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said heating means responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 9
Dependent Claim
60 words
The system of claim 6 wherein said computer means is comprised of: a. analog-to-digital conversion means for converting said measured actual parameter values into digital information, b. a digital computer for determining the difference between said actual parameter values and desired parameter values, and c. digital-to-analog conversion means for selectively operating said heating means in accordance with said determined differences.
Claim 10
Dependent Claim
54 words
The system of claim 6 wherein said computer means is comprised of: a. analog computer means for determining the difference between said actual parameter values and desired parameter values and for generating a signal responsive to said difference and b. control means for selectively operating said heating means in accordance with said generated signal.
Claim 11
Dependent Claim
30 words
The system of claim 6 wherein said measuring means is comprised of a test probe and said heating means is comprised of a probe for passing current through a device.
Claim 12
Dependent Claim
47 words
The system of claim 9 wherein said plurality of devices are fabricated on a single semiconductor substrate and further characterized by said measuring means and said heat applying means being moveable with respect to said semiconductor substrate whereby each device is first tested and then heat treated.
Claim 13
Dependent Claim
25 words
The system of claim 6 wherein said measuring means is comprised of a test probe and said heating means is comprised of a laser beam.
Claim 14
Dependent Claim
47 words
The system of claim 11 wherein said plurality of devices are fabricated on a single semiconductor substrate and further characterized by said measuring means and said heat applying means being moveable with respect to said semiconductor substrate whereby each device is first tested and then heat treated.
Claim 15
Independent Claim
103 words
A system for the adjustment of device parameters of one or more of a plurality of devices fabricated on a single semiconductor slice comprising: a. means for applying an electron beam to said one or more devices, b. means for measuring current generated in said semiconductor slice when said electron beam is applied whereby actual device parameters are determined, c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said electron beam responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 16
Independent Claim
103 words
A system for the adjustment of device parameters of one or more of a plurality of devices fabricated on a single semiconductor slice comprising: a. means for applying an electron beam to said one or more devices, b. means for measuring current generated in said semiconductor slice when said electron beam is applied whereby actual device parameters are determined, c. computer means for determining the differences between said actual parameter values and desired parameter values and for selectively operating said electron beam responsive to said determined differences to independently heat each of said one or more devices in accordance with its respective difference.
Claim 17
Dependent Claim
60 words
The system of claim 13 wherein said computer means is comprised of: a. analog-to-digital conversion means for converting said measured actual parameter values into digital information, b. a digital computer for determining the difference between said actual parameter values and desired parameter values, and c. digital-to-analog conversion means for selectively operating said electron beam in accordance with said determined differences.
Claim 18
Dependent Claim
54 words
The system of claim 13 wherein said computer means is comprised of: a. analog computer means for determining the difference between said actual parameter values and desired parameter values and for generating a signal responsive to said difference and b. control means for selectively operating said electron beam in accordance with said generated signal.
Claim 19
Dependent Claim
52 words
The system of claim 13 wherein said computer means is comprised of: a. means for recording the signal generated in the slice, b. means for playing back said recorded signal, and c. means for selectively operating said electron beam in accordance with the recorded signal when such recorded signal is played back.
Claim 20
Dependent Claim
22 words
The system of claim 13 including a vacuum chamber for containing said means for applying an electron beam, and said semiconductor slice.
Claim 21
Dependent Claim
25 words
The system of claim 17 including grid means for controlling the intensity of said electron beam, said grid means being controlled by said computer means.
Claim 22
Dependent Claim
43 words
The system of claim 18 wherein said plurality of devices are fabricated on one major surface of a semiconductor slice having said one major surface and an opposite major surface and the system including means for applying light to said opposite major surface.
Claim 23
Dependent Claim
11 words
The system of claim 18 wherein said vacuum chamber is demountable.
Claim 24
Dependent Claim
27 words
The system of claim 18 wherein said vacuum chamber is the envelope of a diode array vidicon and said semiconductor slice is the target of said vidicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-04 | 1976-01-03 | 1976-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-04 | 1980-01-03 | 1980-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-04 | 1984-01-03 | 1984-07-04 | $7700.00 | Window Closed / Lapsed |