US3674551A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Formation of openings in insulating layers in mos semiconductor devices
Assignee: RCA Corp
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Filing: 1970-10-12
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Granted: 1972-07-04
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Expires: 1990-10-12
Abstract
Abstract SMALL OPENINGS IN INSULATING COATINGS ON MOS SEMICONDUCTOR DEVICES ARE DEFINED BY (1) FORMING, ON THE SURFACE OF A SEMICONDUCTOR WAFER AT THE DESIRED LOCATIONS FOR THE OPENINGS, MASKING BODIES OF A MATERIAL WHICH IS SOLUBLE IN A GIVEN SOLVENT; (2) DEPOSITING OVER THE ENTIRE WAFER A COATING OF A MATERIAL WHICH IS NOT SOLUBLE IN THAT SOLVENT; (3) ETCHING THIS COATING IN A SUITABLE SOLVENT TO EXPOSE THE MASKING BODIES FORMED IN STEP (1) AND PORTIONS OF THE SURFACE OF THE WAFER; (4) OXIDIZING THE EXPOSED PORTIONS OF THE SURFACE OF THE WAFER; AND, FINALLY (5) REMOVING THE MASKING BODIES IN THE GIVEN SOLVENT.
Inventors
- 👤 Terry George Athanas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 03:26
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10D; H10D99/00; H10P; H10P14/00; H10P14/60; H10P14/61; H10P95/00; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/053; Y10S148/106; Y10S438/00; Y10S438/942; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-04 | 1976-01-03 | 1976-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-04 | 1980-01-03 | 1980-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-04 | 1984-01-03 | 1984-07-04 | $7700.00 | Window Closed / Lapsed |