Generation of silicon tetrafluoride
Abstract
Abstract SILICON TETRAFLUORIDE IS GENERATED BY PASSING A MIXTURE OF HF AND WATER THROUGH A PERVIOUS BED OF CRYSTALLINE SILICA. A REACTION MIXTURE OF SIF4,HF AND WATER IS FORMED IN THE SILICA BED AND IS MAINTAINED IN A VAPOR-LIQUID PHASE AT ABOUT THE DEW POINT UNTIL THE HF THEREIN HAS SUBSTANTIALLY REACTED WITH THE SILICA. AT THE SAME TIME, THE LIQUID OF THE REACTION MIXTURE UNDERGOES VAPORIZATION BY ABSORBING THE HEAT OF THE REACTION, AND CONDITIONS ARE ESTABLISHED AND MAINTAINED TO EFFECT VAPORIZATION OF THE LIQUID AT ABOUT THE SAME RATE THAT IT IS INTRODUCED INTO THE BED. THE REACTION THUS PROCEEDS IN BOTH A LIQUID-SOLID PHASE AND A VAPOR-SOLID PHASE AT THE SAME TIME TO EFFECT CONVERSION OF HF TO SIF4 AT HIGH EFFICIENCIES.
Inventors
- 👤 Richard E Driscoll
- 👤 George L De Cuir
Bibliographic Details
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