US3672948A
Expired / Lapsed
US
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Method for diffusion limited mass transport
Assignee: International Business Machines Corp
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Filing: 1970-01-02
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Granted: 1972-06-27
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Expires: 1990-01-02
Abstract
Abstract METHOD AND APPARATUS FOR CONTINUOUSLY CARRYING OUT MASS TRANSFER REACTIONS IN A REACTION CHAMBER UTILIZING LAMINAR FLOW TO PROVIDE DIFFUSION LIMITED TRANSPORT AND TO PROVIDE ISOLATION BETWEEN PROCESS STEPS. THERE IS PROVIDED A GASEOUS PHASE MATERIAL INLET FILTER TUBE TO INTRODUCE GASEOUS PHASE MATERIAL IN LAMINAR FLOW WITHIN A REACTION ZONE AND AN EXHAUST PRESSURE BAFFLE TO MAINTAIN LAMINAR FLOW THROUGHOUT THE REACTION ZONE. SUBSTRATES MAY BE CONTINUOUSLY PASSED THROUGH A REACTION ZONE TO PROVIDE AN INLINE SYSTEM.
Inventors
- 👤 Robert A Foehring
- 👤 Richard R Garnache
- 👤 Donald M Kenney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 14:42
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45504; C23C16/45519; C23C16/54; C30; C30B; C30B25/00; C30B25/02; C30B25/14; Y; Y10; Y10S; Y10S148/00; Y10S148/006; Y10S438/00; Y10S438/907; Y10S438/935
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-27 | 1975-12-27 | 1976-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-27 | 1979-12-27 | 1980-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-27 | 1983-12-27 | 1984-06-27 | $7700.00 | Window Closed / Lapsed |