US3669871A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus having a concave source cathode
Assignee: International Business Machines Corp
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Filing: 1969-09-10
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Granted: 1972-06-13
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Expires: 1989-09-10
Abstract
Abstract Sputtering apparatus in which the sputtering cathode is concave to produce a focusing effect on dislodged particles and concentrate the particles toward a point. The substrate being coated is movably mounted to construct the desired coating configuration. A modification is to orient single crystal bits on the cathode surface to further enhance preferential directional emission during sputtering.
Inventors
- 👤 Jarl A Elmgren
- 👤 Robert R R Rodite
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3471; C23C14/3478
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
171 words
Sputtering apparatus for concentrating portions of dislodged, sputtered material toward a point comprising: a first electrode having a surface area portion covered with said material to be sputtered, said entire covered surface area portion being shaped to form a single concavity; a second electrode opposite said concavity of said first electrode and spaced to provide a glow discharge region therebetween adjacent said concave surface of said first electrode when energized, said second electrode being normal to the axis of said concavity and lying between the focal point of said concavity and said first electrode, and having an aperture therein on said axis for admitting said dislodged portions to said focal point; means for introducing ionizable particles into said region; energizing means connected to said electrodes for ionizing said particles to create a glow discharge between said electrodes and dislodged portions of said material to be sputtered; and means for supporting a workpiece with an area to be coated with said portions at the focal point of said concavity on its axis.
Claim 2
Dependent Claim
171 words
Sputtering apparatus for concentrating portions of dislodged, sputtered material toward a point comprising: a first electrode having a surface area portion covered with said material to be sputtered, said entire covered surface area portion being shaped to form a single concavity; a second electrode opposite said concavity of said first electrode and spaced to provide a glow discharge region therebetween adjacent said concave surface of said first electrode when energized, said second electrode being normal to the axis of said concavity and lying between the focal point of said concavity and said first electrode, and having an aperture therein on said axis for admitting said dislodged portions to said focal point; means for introducing ionizable particles into said region; energizing means connected to said electrodes for ionizing said particles to create a glow discharge between said electrodes and dislodged portions of said material to be sputtered; and means for supporting a workpiece with an area to be coated with said portions at the focal point of said concavity on its axis.
Claim 3
Dependent Claim
24 words
Apparatus as described in claim 1 wherein said concavity surface lies on a radius from a point on the center axis of said concavity.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-13 | 1975-12-13 | 1976-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-13 | 1979-12-13 | 1980-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-13 | 1983-12-13 | 1984-06-13 | $7700.00 | Window Closed / Lapsed |