US3669863A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Technique for the preparation of iron oxide films by cathodic sputtering
Assignee: AT&T Inc
•
Filing: 1970-12-28
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Granted: 1972-06-13
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Expires: 1990-12-28
Abstract
Abstract A technique for the preparation of iron oxide films designed for use as photomasks for thin film and semiconductor processing involves sputtering iron in a carbon monoxide ambient containing carbon dioxide upon a substrate member.
Inventors
- 👤 Frank Groom Peters
- 👤 William Robert Sinclair
- 👤 Vincent Sullivan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/085; G; G03; G03F; G03F1/00; G03F1/54; C23C14/0021; C23C14/0036; C23C14/0057; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
17 words
A method in accordance with the procedure of claim 1 wherein said cathode comprises cold rolled steel.
Claim 2
Dependent Claim
16 words
A method in accordance with the procedure of claim 1 wherein said cathode comprises iron oxide.
Claim 3
Dependent Claim
19 words
A method in accordance with the procedure of claim 2 wherein said cathode member is biased with RF excitation.
Claim 4
Dependent Claim
28 words
A method in accordance with the procedure of claim 2 wherein said carbon monoxide ambient comprises from 82 to 50 percent by volume carbon monoxide, remainder carbon dioxide.
Claim 5
Dependent Claim
35 words
Photomask having defined areas of iron oxide produced by cathodic sputtering of an iron cathode in a carbon monoxide ambient containing carbon dioxide, said ambient comprising from 87 to 50 percent by volume carbon monoxide.
References Cited (Backward Citations)
US3485666A
Cited
US3461054A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-13 | 1975-12-13 | 1976-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-13 | 1979-12-13 | 1980-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-13 | 1983-12-13 | 1984-06-13 | $7700.00 | Window Closed / Lapsed |