US3669812A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate support module
Assignee: Bendix Corp
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Filing: 1970-10-16
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Granted: 1972-06-13
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Expires: 1990-10-16
Abstract
Abstract A substrate support for controlling the temperature of a substrate during outgassing, deposition, sputter etching and bias sputtering, and after deposition. This support comprises a block of thermal conducting material having heating means at one side and cooling means at the opposite side. The material cross section of the block is reduced by a series of holes drilled from two directions into the block at 90 degrees to one another so that a great number of equal size columns equidistantly spaced connect the heated and cooled sides of the block. This permits heating and cooling of a substrate within a very few minutes.
Inventors
- 👤 Frieder H Ensslin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-13 | 1975-12-13 | 1976-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-13 | 1979-12-13 | 1980-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-13 | 1983-12-13 | 1984-06-13 | $7700.00 | Window Closed / Lapsed |