US3665346A
Expired / Lapsed
US
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Thin film distributed rc structure
Assignee: AT&T Inc
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Filing: 1969-10-16
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Granted: 1972-05-23
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Expires: 1989-10-16
Abstract
Abstract This disclosure describes a thin film distributed RC circuit component consisting of an inert substrate, an anodizable resistive film, an oxide dielectric layer produced upon the film and a conductive counterelectrode deposited on the dielectric layer. The resistive film is a suitable refractory metal. A pattern of spaced apertures are etched through the conductive counterelectrode to but not beyond the underlying oxide layer. The apertures must be sufficiently large to pass an anodizing solution. By selecting the thickness and resistor pattern of the anodizable film, as well as the size and spacing of the apertures, the resulting component is readily adjusted as to frequency response or other characteristics.
Inventors
- 👤 William H Orr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:52
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/80; H10D86/85; C; C25; C25D; C25D11/00; C25D11/02; C25D11/32; H05; H05K; H05K1/00; H05K1/16; H05K1/167; H05K3/00; H05K3/02; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
106 words
A circuit component comprising an inert substrate, an anodizable resistive film selected from the group consisting of niobium, titanium, zirconium, cadmium, tantalum, tungsten, and molybdenum deposited on said substrate and having a predetermined thickness and selected resistor pattern, an oxiDe dielectric layer produced upon the resistive film by anodization thereof, and a conductive counterelectrode deposited upon the dielectric layer and having a pattern of spaced apertures etched through to, but not into the underlying oxide layer, the apertures being sufficiently large to pass an anodizing solution, and the aperture shape and spacing being selected to effect a predetermined percentage change in the resistance of said counterelectrode.
Claim 2
Dependent Claim
106 words
A circuit component comprising an inert substrate, an anodizable resistive film selected from the group consisting of niobium, titanium, zirconium, cadmium, tantalum, tungsten, and molybdenum deposited on said substrate and having a predetermined thickness and selected resistor pattern, an oxiDe dielectric layer produced upon the resistive film by anodization thereof, and a conductive counterelectrode deposited upon the dielectric layer and having a pattern of spaced apertures etched through to, but not into the underlying oxide layer, the apertures being sufficiently large to pass an anodizing solution, and the aperture shape and spacing being selected to effect a predetermined percentage change in the resistance of said counterelectrode.
Claim 3
Dependent Claim
47 words
A circuit component in accordance with claim 1, wherein the apertures comprise a plurality of narrow, elongated slits in said counterelectrode which when projected on said resistor pattern appear at regular intervals and on alternate sides thereof, said slit interval being approximately equal to the slit length.
Claim 4
Dependent Claim
42 words
A circuit component in accordance with claim 1, wherein the film is tantalum and the apertures comprise a plurality of spaced slits in said counterelectrode which when projected on said resistor pattern are perpendicular to, and extend entirely across, the resistor path.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-23 | 1975-11-22 | 1976-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-23 | 1979-11-22 | 1980-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-23 | 1983-11-22 | 1984-05-23 | $7700.00 | Window Closed / Lapsed |