US3664896A
Expired / Lapsed
US
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Deposited silicon diffusion sources
Assignee: DAVID M DUNCAN
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Filing: 1969-07-28
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Granted: 1972-05-23
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Expires: 1989-07-28
Abstract
Abstract Non-single crystal semiconductor material formed on a semiconductor substrate and separated from all but a portion of the substrate by an intervening insulation layer contains at least one dopant and preferably two dopants of opposite conductivity type. Heating the substrate, together with the overlying insulation and non-single crystal semiconductor layers, drives the dopants contained in the non-single crystal semiconductor material into the underlying semiconductor substrate in such a manner as to form diodes or transistors.
Inventors
- 👤 David M Duncan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 00:51
CPC Classifications
H; H10; H10P; H10P95/00; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/1414; H10P32/17; H10P32/171; H10W; H10W74/00; H10W74/40; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/106; Y10S148/113; Y10S148/114; Y10S148/122; Y10S148/151; Y10S438/00; Y10S438/914; Y10S438/923
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
46 words
The process of claim 1 wherein said first selected concentration is in the range of approximately 1014 to 1017 impurity atoms/cm3, said third selected concentration iS on the order of 1019 atoms/cm3 and said fourth selected concentration is on the order of at least 1020 atoms/cm3.
Claim 2
Dependent Claim
32 words
The process of claim 2 in which said impurity of said second conductivity type is boron, and said second selected concentration is on the order of 1019 impurity atoms per cubic centimeter.
References Cited (Backward Citations)
US3484313A
Cited
US3460007A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-23 | 1975-11-22 | 1976-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-23 | 1979-11-22 | 1980-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-23 | 1983-11-22 | 1984-05-23 | $7700.00 | Window Closed / Lapsed |