US3661253A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Retaining trays for semiconductor wafers and the like
Assignee: SunEdison Inc
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Filing: 1969-12-04
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Granted: 1972-05-09
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Expires: 1989-12-04
Abstract
Abstract A series of marginally registrable plastic trays having a plurality of wells for accommodating semiconductor wafers and similar elements. The retaining wells are provided with a wall having a surface configuration such that the critical surface of the wafer does not contact the well. A removable cap is disposed over each of the retaining wells and is provided with means for engaging the upwardly presented surface of the semiconductor wafer. Each of the trays is registrable with like trays so that a series of these trays can be stacked, wrapped, and shipped as a unit.
Inventors
- 👤 Paul W Cronkhite
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:15
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/18; B; B65; B65D; B65D73/00; B65D73/0035
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
144 words
A tray for retaining relatively thin flat semiconductor wafers which have a critical surface and a surface opposed to said critical surface, said tray comprising a supporting member having a boss thereon which forms a recess sized to accommodate semiconductor wafers, said recess having a wall which is operatively connected to said supporting member and forming a recess opening larger than the wafer to be supported in said recess, said wall being of such size and shape to support a wafer with the critical surface presented away from the opening and in such manner that only the marginal edge portions of said wafer contact said wall when oriented in substantially any position with respect to said wall, cover means removably disposed over said recess, and means operatively associated with said cover means for engaging the surface of the wafer opposed to said critical surface.
Claim 2
Dependent Claim
144 words
A tray for retaining relatively thin flat semiconductor wafers which have a critical surface and a surface opposed to said critical surface, said tray comprising a supporting member having a boss thereon which forms a recess sized to accommodate semiconductor wafers, said recess having a wall which is operatively connected to said supporting member and forming a recess opening larger than the wafer to be supported in said recess, said wall being of such size and shape to support a wafer with the critical surface presented away from the opening and in such manner that only the marginal edge portions of said wafer contact said wall when oriented in substantially any position with respect to said wall, cover means removably disposed over said recess, and means operatively associated with said cover means for engaging the surface of the wafer opposed to said critical surface.
Claim 3
Dependent Claim
20 words
The tray of claim 1 further characterized in that a plurality of recesses are operatively formed on said supporting member.
Claim 4
Dependent Claim
32 words
The tray of claim 1 further characterized in that an annular bead is operatively associated with the upper end of said boss and is sized to engage the cover means disposed thereon.
Claim 5
Dependent Claim
18 words
The tray of claim 3 further characterized in that each bead is somewhat circular in vertical cross section.
Claim 6
Dependent Claim
34 words
The tray of claim 1 wherein said cover means is a caplike cover member which has a dish-shaped wall including a downwardly projecting surface which engages the wafer at a point somewhat centrally thereof.
Claim 7
Dependent Claim
39 words
The tray of claim 1 further characterized in that said wall has a bottom portion which is substantially Flat and that a wafer is disposed in substantially parallel relationship to said bottom wall portion when located in said recess.
Claim 8
Dependent Claim
14 words
The tray of claim 1 further characterized in that said wall is arcuately shaped.
Claim 9
Dependent Claim
54 words
The tray of claim 1 further characterized in that said wall has a pair of tapered wall sections for supporting the wafer and a bottom wall section, the latter being diametrally smaller than the tapered wall sections so that a wafer may be disposed in spaced relationship with respect to said bottom wall section.
Claim 10
Dependent Claim
138 words
A tray for retaining relatively thin flat semiconductor wafers which have a critical surface and a surface opposed to said critical surface, said tray comprising a supporting member having a boss thereon which forms a recess sized to accommodate a semiconductor wafer, said recess having a wall which is operatively connected to said supporting member and forming a recess opening larger than the wafer to be supported in said recess, a thin flat semiconductor wafer disposed in said recess with its critical surface presented away from the opening and having only its marginal edge portions in contact with said recess when oriented in substantially any position with respect to said wall, cover means removably disposed over said recess, and means operatively associated with said cover means for engaging the surface of the wafer opposed to said critical surface.
Claim 11
Dependent Claim
138 words
A tray for retaining relatively thin flat semiconductor wafers which have a critical surface and a surface opposed to said critical surface, said tray comprising a supporting member having a boss thereon which forms a recess sized to accommodate a semiconductor wafer, said recess having a wall which is operatively connected to said supporting member and forming a recess opening larger than the wafer to be supported in said recess, a thin flat semiconductor wafer disposed in said recess with its critical surface presented away from the opening and having only its marginal edge portions in contact with said recess when oriented in substantially any position with respect to said wall, cover means removably disposed over said recess, and means operatively associated with said cover means for engaging the surface of the wafer opposed to said critical surface.
Claim 12
Dependent Claim
14 words
The tray of claim 9 further characterized in that said wall is arcuately shaped.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-09 | 1975-11-08 | 1976-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-09 | 1979-11-08 | 1980-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-09 | 1983-11-08 | 1984-05-09 | $7700.00 | Window Closed / Lapsed |