US3660156A
Expired / Lapsed
US
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Semiconductor doping compositions
Assignee: Monsanto Co
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Filing: 1970-08-19
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Granted: 1972-05-02
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Expires: 1990-08-19
Abstract
Abstract The disclosure herein relates to semiconductor doping compositions and to methods for their preparation and use. More particularly, the disclosure relates to liquid silica-based doping compositions which may be applied to a surface of a semiconductor substrate and, upon heating, an impurity is diffused from a film of the doping composition into the substrate to form a region therein having the desired electrical properties.
Inventors
- 👤 John George Schmidt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:50
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/19; H10P14/00; H10P14/60; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/118; Y10S252/00; Y10S252/95
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
29 words
Composition according to claim 1 wherein the silicon and dopant atoms in said copolymer are present in a ratio of at least one silicon atom to one dopant atom.
Claim 2
Dependent Claim
17 words
Composition according to claim 2 wherein said silicon and dopant atoms have only oxygen atoms attached thereto.
Claim 3
Dependent Claim
20 words
Composition according to claim 3 wherein said dopant atoms are selected from the group consisting of acceptors, donors and traps.
Claim 4
Dependent Claim
18 words
Composition according to claim 4 wherein said acceptors are selected from the group consisting of Group V elements.
Claim 5
Dependent Claim
21 words
Composition according to claim 5 wherein the Group V element is selected from the group consisting of phosphorus, arsenic and antimony.
Claim 6
Dependent Claim
18 words
Composition according to claim 4 wherein said donors are selected from the group consisting of Group III elements.
Claim 7
Dependent Claim
22 words
Composition according to claim 7 wherein the Group III element is selected from the group consisting of boron, aluminum, gallium and indium.
Claim 8
Dependent Claim
50 words
Process for the preparation of a colloidal suspension of a solid copolymer of hydrated oxides comprising hydrated silica and at least one hydrated oxide of a dopant element homogeneously dispersed in an anhydrous polar solvent which comprises reacting silicon tetrahydroxide with a hydroxide of said dopant element in said solvent.
Claim 9
Dependent Claim
46 words
Process according to claim 9 wherein said silicon tetrahydroxide and said hydroxide of a dopant element are prepared by esterifying an estrifiable silicon compound and an esterifiable compound of said dopant element and reacting the formed esters with an organic acid in an anhydrous polar solvent.
Claim 10
Dependent Claim
53 words
Process according to claim 10 wherein said silicon compound is selected from the group consisting of halides, hydrides, alkoxides and alkyl and aryl esters of silicon; said compound of a dopant element is selected from the group consisting of halides, hydrides, oxides, alkoxides, esters and alkyl and aryl derivatives of the dopant element.
Claim 11
Dependent Claim
27 words
Process according to claim 10 wherein the esterification of the organic acid by the formed esters is carried out in the presence of a Lewis acid catalyst.
Claim 12
Dependent Claim
39 words
Process according to claim 9 wherein said silicon tetrahydroxide and said hydroxide of a dopant element are prepared by esterification of an organic acid with esters of silicon and the dopant element in the presence of an esterification catalyst.
Claim 13
Dependent Claim
57 words
Process according to claim 13 wherein said silicon compound is a tetrahydrocarbyloxysilane; said compound of a dopant element is selected from the group consisting of the hydrocarbyloxy derivatives of arsenic, boron, phosphorus and antimony; said polar solvent is an alcohol and said catalyst is selected from the group consisting of metal halides, metal alkyls and mineral acids.
Claim 14
Dependent Claim
36 words
Process according to claim 14 wherein the silicon compound is tetraethoxysilane; the compound of a dopant element is triethoxyarsine; the polar solvent is ethanol; the carboxylic acid is acetic acid and the catalyst is titanium tetrachloride.
Claim 15
Dependent Claim
92 words
Process for doping semiconductor materials which comprises: a. applying to the surface of said semiconductor a film of a doping solution comprising a colloidal suspension of a solid copolymer of hydrated oxides comprising hydrated silica and at least one hydrated oxide of a dopant element homogeneously dispersed in an anhydrous polar solvent; b. evaporation said solvent from the said film and c. heating the filmed semiconductor to drive off water and leave a dehydrated copolymer of said oxides from which the dopant element is diffused into said semiconductor at sufficiently high temperature.
Claim 16
Dependent Claim
29 words
Process according to claim 16 wherein said semiconductor materials are selected from the group consisting of silicon, germanium, and mixtures thereof, I-VII, II-VI and III-V compounds and mixtures thereof.
Claim 17
Dependent Claim
20 words
Process according to claim 16 wherein the silicon and dopant element in said copolymer have only oxygen atoms attached thereto.
Claim 18
Dependent Claim
18 words
Process according to claim 16 wherein the silicon-to-dopant element atomic ratio in said copolymer is at least one-to-one.
References Cited (Backward Citations)
US3540951A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-02 | 1975-11-01 | 1976-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-02 | 1979-11-01 | 1980-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-02 | 1983-11-01 | 1984-05-02 | $7700.00 | Window Closed / Lapsed |