US3657006A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for depositing doped and undoped glassy chalcogenide films at substantially atmospheric pressure
Assignee: HADEN J BOURG JR
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Filing: 1969-11-06
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Granted: 1972-04-18
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Expires: 1989-11-06
Abstract
Abstract Glassy chalcogenide films like copper-doped arsenic selenide, useful in vidicons and amorphous, current-controlled switches and hitherto obtainable only through time-consuming vacuum-deposition techniques, are obtained by heating and reacting in an open tube a first compound (arsine, stibine, phosphine, or the like) with a second compound (hydrogen selenide, hydrogen sulfide, or the like). Hydrogen gas is preferably used as a flush gas, and the dopant is preferably supplied in vapor form so that the amount thereof in the film can be readily controlled.
Inventors
- 👤 Peter D Fisher
- 👤 James C Word
- 👤 Haden J Bourg Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 06:53
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/02; C03C3/00; C03C3/32; C03C3/321; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/305; Y; Y10; Y10S; Y10S148/00; Y10S148/12; Y10S65/00; Y10S65/15
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
54 words
A method as defined in claim 1, characterized in that said first and second substances are conducted while at about room temperature to said open-ended vessel at flow rates so metered as to yield a film having a thickness of about 2,000 to 10,000 A. in a time of about 5 to 50 minutes.
Claim 2
Dependent Claim
44 words
A method as defined in claim 2, characterized in that doped films are made by also conducting to said open-ended vessel a suitable dopant-precursor material in vapor form at a metered flow rate, whereby doped films of uniform and desired dopant concentration are obtained.
Claim 3
Dependent Claim
27 words
A method as defined in claim 3, characterized in that the dopant used is copper, whereby films particularly sensitive to infrared radiation of desired wavelength are obtained.
Claim 4
Dependent Claim
35 words
A method as defined in claim 3, characterized in that the dopant used is an element selected from the group consisting of silicon, tin and germanium, whereby films of desired lengthened photoresponse time are obtained.
Claim 5
Dependent Claim
168 words
Apparatus for making glassy chalcogenide films of material selected from the group consisting of the selenides and tellurides of arsenic and antimony, said apparatus comprising, in combination, a source of a first substance comprising a compound composed of hydrogen and an element selected from the group consisting of selenium and tellurium, a source of a second substance comprising a compound composed of hydrogen and an element selected from the group consisting of arsenic and antimony, an open-ended vessel having an upstream end and a downstream end, conduit means that contain flow-regulation means for conducting said first and second substances from their sources to said upstream end of said vessel, heating means surrounding said vessel and operative to bring said substances to a temperature sufficiently elevated to cause chemical reaction between them, means in the vicinity of said downstream end of said vessel for receiving a workpiece upon which a film is to be provided, and a hood for removing gases issuing from said downstream end of said vessel.
Claim 6
Dependent Claim
44 words
Apparatus as defined in claim 6, characterized in that said combination further comprises a source of dopant-precursor material in vapor form, and conduit means that contain flow-regulation means for conducting said dopant-precursor material at a metered rate to said upstream end of said vessel.
References Cited (Backward Citations)
US3424610A
Cited
US3390090A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-18 | 1975-10-18 | 1976-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-18 | 1979-10-18 | 1980-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-18 | 1983-10-18 | 1984-04-18 | $7700.00 | Window Closed / Lapsed |