US3655545A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Post heating of sputtered metal oxide films
Assignee: PPG Industries Inc
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Filing: 1970-07-02
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Granted: 1972-04-11
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Expires: 1990-07-02
Abstract
Abstract This invention relates to a novel method of producing electroconductive metal oxide films by cathodic sputtering. It especially pertains to a method of increasing the electroconductivity of sputtered metal oxide films by mildly reducing said films. The reduction step follows sputtering and generally involves heating the metal oxide film in a nonoxidizing or reducing atmosphere for a sufficient period of time to reduce the oxygen content of said film by a minor amount but without substantially reducing the oxide film to metallic form.
Inventors
- 👤 Frank H Gillery
- 👤 Jean P Pressau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:21
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5806; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C03C17/2453; C03C23/00; C03C23/007; C23C14/06; C23C14/08; C23C14/086; C23C14/5846; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/211; C03C2217/215; C03C2217/23; C03C2217/231; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/154
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
13 words
The method of claim 1 wherein the post heating is conducted in vacuo.
Claim 2
Dependent Claim
15 words
The method of claim 1 wherein the post heating is conducted in a reducing atmosphere.
Claim 3
Dependent Claim
15 words
The method of claim 1 wherein the post heating is conducted in a hydrogen-containing atmosphere.
Claim 4
Dependent Claim
10 words
The method of claim 1 wherein the substrate is glass.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein post heating is conducted at a temperature of about 240* C. to about 340* C.
Claim 6
Dependent Claim
11 words
The method of claim 1 wherein the metal cathode contains indium.
Claim 7
Dependent Claim
27 words
The method of claim 7 wherein the post heating is at a temperature of about 240* C. to about 340* C. for less than about two hours.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein the metal cathode contains a greater quantity of indium that that of tin.
Claim 9
Dependent Claim
23 words
The method of claim 9 wherein the metal cathode contains a maximum of 20 percent by weight of tin and the balance indium.
References Cited (Backward Citations)
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US2825687A
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US3108019A
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US3370978A
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US3420706A
Cited
US3336661A
Cited
US3386906A
Cited
US3438885A
Cited
US3506556A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-11 | 1975-10-11 | 1976-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-11 | 1979-10-11 | 1980-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-11 | 1983-10-11 | 1984-04-11 | $7700.00 | Window Closed / Lapsed |