Electromechanical transducers and housings

Claim 2

An electromechanical transducer for responding to the magnitude of an applied force comprising, a. a relatively thin diaphragm of a given cross-section, and having a predetermined active area which deflects upon the application of said force thereto, and a non-active area substantially uneffected by said force, b. force responsive element mounted on said diaphragm in said active area, and having first and second terminals, c. a longitudinal tubular member disposed about an axis, and having open top and bottom ends, said member having a central aperture relatively congruent with said predetermined active area of said diaphragm and having on a surface thereof at least one slot approximately parallel to said axis, d. means for mounting said diaphragm at said non-active area over said open top end of said tubular member, and e. at least one conductor coupled to one of said terminals of said force responsive element and directed towards said bottom open end of said member within said at least one slot.

Claim 3

The transducer according to claim 1 wherein said longitudinal tubular member is fabricated from a ceramic insulator material.

Claim 4

The transducer according to claim 1 wherein said longitudinal tubular member is fabricated from a conductive metallic material and said slot is insulated.

Claim 5

An electromechanical transducer of the type employing a semiconductor diaphragm having a given cross sectional surface configuration and having deposited on a surface thereof a plurality of piezo-resistive elements, each of which exhibits an impedance variation proportional to the deflection of said diaphragm, said elements being located in proximity with a central portion of said diaphragm defining an active region and surrounded by another portion of said diaphragm defining a non-active region, wherein said active region is that portion of said diaphragm which deflects most readily upon the application of a force to said diaphragm, the improvement therewith comprising, a. a plurality of terminals deposited on said diaphragm within said non-active region and located on said surface, b. means coupling each of said piezo-resistive elements to different selected ones of said terminals on said non-active area, c. an annular housing means coupled to said non-active area of said diaphragm for supporting the same thereat, said housing having a central aperture approximately congruent with said central portion of said diaphragm, said central aperture of said housing surrounding said active area of said diaphragm to thereby permit said active area to readily deflect upon application of said force thereto, said housing means including wire accommodating apertures on a surface thereof, d. leads coupled to said terminals on said non-active area and directed from said housing, said leads being located within said wire accommodating apertures on said surface of said housing.

Claim 6

An electromechanical transducer of the type employing a semiconductor diaphragm having a given cross sectional surface configuration and having deposited on a surface thereof a plurality of piezo-resistive elements, each of which exhibits an impedance variation proportional to the deflection of said diaphragm, said elements being located in proximity with a central portion of said diaphragm defining an active region and surrounded by another portion of said diaphragm defining a non-active region, wherein said active region is that portion of said diaphragm which deflects most readily upon the application of a force to said diaphragm, the improvement therewith comprising, a. a plurality of terminals deposited on said diaphragm within said non-active region and located on said surface, b. means coupling each of said piezo-resistive elements to different selected ones of said terminals on said non-active area, c. an annular housing means coupled to said non-active area of said diaphragm for supporting the same thereat, said housing having a central aperture approximately congruent with said central portion of said diaphragm, said central aperture of said housing surrounding said active area of said diaphragm to thereby permit said active area to readily deflect upon application of said force thereto, said housing means including wire accommodating apertures on a surface thereof, d. leads coupled to said terminals on said non-active area and directed from said housing, said leads being located within said wire accommodating apertures on said surface of said housing.

Claim 7

An electromechanical transducer of the type employing a silicon diaphragm having a given cross sectional surface configuration and having deposited on a surface thereof a plurality of piezo-resistive elements, each of which exhibits an impedance variation proportional to the deflection of said diaphragm, said elements being located in proximity with a central portion of said diaphragm defining an active region and surrounded by another portion of said diaphragm defining a non-active region, wherein said active region is that portion of the diaphragm which deflects most readily upon the application of a force to said diaphragm, the improvement therewith comprising, a. plurality of terminals located on said surface of said diaphragm and within saId non-active region thereof, b. plurality of conductive paths positioned on said surface coupling each of said elements with a preselected one of said terminals, c. a longitudinal cylindrical member disposed about a given axis and having open top and bottom ends, said housing having a plurality of conductor accommodating apertures located on a side surface, d. means for coupling said diaphragm to said cylindrical member at said non-active region over said top end of said member, and e. a plurality of conductors each one separately located in one of said apertures and connected to a separate one of said terminals and directed from said terminals to said bottom opening of said cylindrical member.

Claim 8

An electromechanical transducer of the type employing a silicon diaphragm having a given cross sectional surface configuration and having deposited on a surface thereof a plurality of piezo-resistive elements, each of which exhibits an impedance variation proportional to the deflection of said diaphragm, said elements being located in proximity with a central portion of said diaphragm defining an active region and surrounded by another portion of said diaphragm defining a non-active region, wherein said active region is that portion of the diaphragm which deflects most readily upon the application of a force to said diaphragm, the improvement therewith comprising, a. plurality of terminals located on said surface of said diaphragm and within saId non-active region thereof, b. plurality of conductive paths positioned on said surface coupling each of said elements with a preselected one of said terminals, c. a longitudinal cylindrical member disposed about a given axis and having open top and bottom ends, said housing having a plurality of conductor accommodating apertures located on a side surface, d. means for coupling said diaphragm to said cylindrical member at said non-active region over said top end of said member, and e. a plurality of conductors each one separately located in one of said apertures and connected to a separate one of said terminals and directed from said terminals to said bottom opening of said cylindrical member.

Claim 9

The electromechanical transducer according to claim 5 wherein, said longitudinal cylindrical member is fabricated from an insulating type material.

Claim 10

The transducer according to claim 5 wherein, said plurality of conductive paths positioned on said surface are metallized paths deposited thereon by an aluminum evaporation process.

Claim 11

The transducer according to claim 5 wherein, said plurality of conductive paths positioned on said surface are thin film gold-nickel conductors.

Claim 12

An electromechanical transducer assembly for measuring the intensity of a force applied thereto comprising, a. a relatively thin member having a predetermined active portion for deflecting upon application of said force thereto, and a predetermined non-active portion which is substantially unaffected by said force, b. support means coupled to said non-active portion of said thin member for supporting said member with said active portion positioned for easy deflection upon application of said force, said support means having at least one continuous conductor accommodating aperture directed from a first end of said support means to a second end, c. at least one force responsive element located on said active portion of said thin member, d. a terminal located on said non-active portion of said diaphragm, e. a first conductor coupling said force responsive element to said terminal, and f. a second conductor coupled to said terminal and directed away from said element, said second conductor being located within said conductor accommodating aperture.

Claim 13

An electromechanical transducer assembly for measuring the intensity of a force applied thereto comprising, a. a relatively thin member having a predetermined active portion for deflecting upon application of said force thereto, and a predetermined non-active portion which is substantially unaffected by said force, b. support means coupled to said non-active portion of said thin member for supporting said member with said active portion positioned for easy deflection upon application of said force, said support means having at least one continuous conductor accommodating aperture directed from a first end of said support means to a second end, c. at least one force responsive element located on said active portion of said thin member, d. a terminal located on said non-active portion of said diaphragm, e. a first conductor coupling said force responsive element to said terminal, and f. a second conductor coupled to said terminal and directed away from said element, said second conductor being located within said conductor accommodating aperture.

Claim 14

The transducer assembly according to claim 13 wherein, said relatively thin member is a disk-like thin diaphragm, having a central portion defining said active area and a peripheral portion defining said non-active area.

Claim 15

The transducer assembly according to claim 10 wherein said support means comprises, an annular housing having a central aperture relatively congruent with said central portion of said disk-like diaphragm and having said at least one conductor accommodating aperture in a side surface thereof, said annular housing being coupled to said disk at the peripheral portion thereof to position said active area of said disk in congruency with said central aperture of said annular housing.