US3649862A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Separated ion beam source with adjustable separation
Assignee: COLUTRON CORP
•
Filing: 1969-05-01
•
Granted: 1972-03-14
•
Expires: 1989-05-01
Abstract
Abstract An ion beam source includes an ion source, ion accelerator and focusing system, and a velocity filter with a deflection plate pair. The velocity filter provides for dispersion of ions according to their charge, mass and velocity. The ion source includes a nonconducting barrel, a filament mounted in the barrel and an anode enclosing the barrel opening except for a source aperture. Filament current is arranged to provide an electron current to the anode, this electron current ionizes the charge material thus forming a plasma cloud for ejecting into the focusing and lens system, and then into a velocity filter causing separation of ion beam.
Inventors
- 👤 Lars E Wahlin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 05:20
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; G; G21; G21K; G21K1/00; G21K1/08; H01J49/00; H01J49/26; H01J49/28; H01J49/284; H01J49/286
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
212 words
An ion beam source with an adjustable ion separator comprising a tubular housing arranged for a hermetic connection by one end to a device for utilizing an ion beam; an ion source releasably mounted in said housing inclusive of electric filament means, and means for introducing charge material into said filament; said ion source being releasably and hermetically sealed in said housing; support means mounted internally of said housing adjacent to and extending away from said ion source; a plurality of electrostatic lenses adjustably mounted on said support means and completely enclosed in said housing; electric circuit means extending through and hermetically sealed in the wall of said housing and in conductive connection with said lenses; a velocity filter inclusive of a pair of electrostatic plates and a pair of horizontal coils, providing crossed magnetic and electric fields, mounted in lateral alignment forming a beam path therethrough and completely enclosed in said housing and in alignment with said lenses; and a plurality electrostatic shims spacedly mounted in opposed pairs in said beam path in said filter for guiding an ion beam through said velocity filter without a focusing effect; and means hermetically sealed through said housing for supplying an electric current to said coils in said velocity filter and to said shims.
Claim 2
Dependent Claim
212 words
An ion beam source with an adjustable ion separator comprising a tubular housing arranged for a hermetic connection by one end to a device for utilizing an ion beam; an ion source releasably mounted in said housing inclusive of electric filament means, and means for introducing charge material into said filament; said ion source being releasably and hermetically sealed in said housing; support means mounted internally of said housing adjacent to and extending away from said ion source; a plurality of electrostatic lenses adjustably mounted on said support means and completely enclosed in said housing; electric circuit means extending through and hermetically sealed in the wall of said housing and in conductive connection with said lenses; a velocity filter inclusive of a pair of electrostatic plates and a pair of horizontal coils, providing crossed magnetic and electric fields, mounted in lateral alignment forming a beam path therethrough and completely enclosed in said housing and in alignment with said lenses; and a plurality electrostatic shims spacedly mounted in opposed pairs in said beam path in said filter for guiding an ion beam through said velocity filter without a focusing effect; and means hermetically sealed through said housing for supplying an electric current to said coils in said velocity filter and to said shims.
Claim 3
Dependent Claim
18 words
An ion beam source according to claim 1 wherein said ion source is independently removable from said housing.
Claim 4
Dependent Claim
30 words
An ion beam source according to claim 1 wherein said support means forms a bus bar for said lenses, and said electric circuit means is connected to said support means.
Claim 5
Dependent Claim
34 words
An ion beam source according to claim 1 being further characterized by at least a pair of electrostatic deflection plates mounted between said lenses and said filter for aligning said beam in said filter.
Claim 6
Dependent Claim
49 words
An ion beam source according to claim 1 wherein said ion source includes a nonconducting body, a heating coil internally thereof and an apertured anode plate adjacent said lenses, whereby a plasma cloud formed in said ion source is attached to said plate around said aperture adjacent said lenses.
Claim 7
Dependent Claim
22 words
An ion beam source according to claim 1 wherein said ion source is mounted in a heat sink mounted in said housing.
Claim 8
Dependent Claim
130 words
A velocity filter for separating an ion beam comprising a pair of spaced-apart horizontal coils and a pair of spaced-apart vertical electrostatic deflector plates mounted in lateral alignment providing a beam path therebetween; said horizontal coils being provided with poles having opposed faces providing a boundary for a beam passed through said filter, and the faces of said poles being sloped so that one side of said path is narrower than the other; a plurality of shims mounted in opposed pairs on opposite sides of the beam path through said filter; said shims being staggered outwardly from each side of said path to the center thereof and each being insulated from each other; means for electrically charging said coils and plates; and means for charging opposed pairs of said shims.
Claim 9
Dependent Claim
130 words
A velocity filter for separating an ion beam comprising a pair of spaced-apart horizontal coils and a pair of spaced-apart vertical electrostatic deflector plates mounted in lateral alignment providing a beam path therebetween; said horizontal coils being provided with poles having opposed faces providing a boundary for a beam passed through said filter, and the faces of said poles being sloped so that one side of said path is narrower than the other; a plurality of shims mounted in opposed pairs on opposite sides of the beam path through said filter; said shims being staggered outwardly from each side of said path to the center thereof and each being insulated from each other; means for electrically charging said coils and plates; and means for charging opposed pairs of said shims.
Claim 10
Dependent Claim
24 words
A velocity filter according to claim 7 wherein said shims are mounted on pins depending from said poles and are insulated from said poles.
Claim 11
Dependent Claim
26 words
A velocity filter according to claim 7 wherein said means for charging said opposed pairs of shims is adjustable for adjusting the charge on said shims.
Claim 12
Dependent Claim
32 words
A velocity filter according to claim 7 further characterized by at least a pair of electrostatic deflection plates mounted at the opening of said filter for aligning a beam entering said filter.
Claim 13
Dependent Claim
102 words
An ion source for emitting an ion or plasma cloud in a vacuum comprising a nonmetallic tubular body having an open end and a generally closed end; means for mounting said body in a heat sink to dissipate generated heat; an electric heating filament mounted in said body; there being an opening in said closed end arranged to permit a probe to be introduced into said filament; a conducting metal disc with a central aperture closing the open end of said body including electric connection means extending from said disc; and electric circuit means for heating said filament and charging said disc.
Claim 14
Dependent Claim
102 words
An ion source for emitting an ion or plasma cloud in a vacuum comprising a nonmetallic tubular body having an open end and a generally closed end; means for mounting said body in a heat sink to dissipate generated heat; an electric heating filament mounted in said body; there being an opening in said closed end arranged to permit a probe to be introduced into said filament; a conducting metal disc with a central aperture closing the open end of said body including electric connection means extending from said disc; and electric circuit means for heating said filament and charging said disc.
Claim 15
Dependent Claim
36 words
An ion source according to claim 11 wherein a nonconducting washer member is mounted at the opening of said body abutting said disc to reduce the exposed surface area of said disc internally of said body.
Claim 16
Dependent Claim
19 words
An ion source according to claim 12 wherein said body and said washer are made of a ceramic material.
Claim 17
Dependent Claim
13 words
An ion source according to claim 11 wherein said body is boron nitride.
Claim 18
Dependent Claim
39 words
An ion source according to claim 11 wherein said heating filament is arranged as the cathode for said anode plate, and provides an electric discharge on said plate for gathering and holding a plasma cloud produced by said discharge.
References Cited (Backward Citations)
US2507652A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-03-14 | 1975-09-13 | 1976-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-03-14 | 1979-09-13 | 1980-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-03-14 | 1983-09-13 | 1984-03-14 | $7700.00 | Window Closed / Lapsed |