Abstract A method and apparatus for adjusting the resistance value of film resistors by arc probe means which removes the resistor material until readout means in the apparatus indicates that a desired resistance value has been obtained. A work table in the apparatus holds the resistor being trimmed so that it can be moved in a given plane with respect to the stationary arc probe means while the resistor material is being removed. The adjustment of resistance values by his technique carefully removes the resistive material thereby increasing the resistance of the film resistor until the desired value is obtained and permits trimming a resistor in a microelectronic circuit while power is being applied to the circuit.
Apparatus for adjusting tHe resistance of a planar film resistor by trimming comprising a. an apparatus base, b. movable planar platform means mounted on said base for supporting the planar film resistor to be trimmed, said platform means including means for moving said resistor relative to said base in directions parallel to the planar dimensions of said resistor, c. electrical contact means supported by said platform for movement with said resistor and having contact portions arranged to electrically contact opposite ends of said film resistor, d. measurement circuit means including DC potential means and resistance detecting means interconnecting said contact means for monitoring the resistance of said resistor during use of the apparatus, e. pivotal arc probe means attached to said base and including adjustable counterbalance means and terminating in an electrically conducting probe element the end of which is supported over said platform means for contacting said resistor with adjustable pressure at a fixed point with respect to said base whereby movement of said platform means with said resistor will cause relative movement between said probe element and resistor while maintaining controlled pressure contact between them, and f. arc probe circuit means including an electrical power supply, said probe element and switch means for causing removal of that part of said resistor touched by said probe element.
Claim 2
Dependent Claim
218 words
Apparatus for adjusting tHe resistance of a planar film resistor by trimming comprising a. an apparatus base, b. movable planar platform means mounted on said base for supporting the planar film resistor to be trimmed, said platform means including means for moving said resistor relative to said base in directions parallel to the planar dimensions of said resistor, c. electrical contact means supported by said platform for movement with said resistor and having contact portions arranged to electrically contact opposite ends of said film resistor, d. measurement circuit means including DC potential means and resistance detecting means interconnecting said contact means for monitoring the resistance of said resistor during use of the apparatus, e. pivotal arc probe means attached to said base and including adjustable counterbalance means and terminating in an electrically conducting probe element the end of which is supported over said platform means for contacting said resistor with adjustable pressure at a fixed point with respect to said base whereby movement of said platform means with said resistor will cause relative movement between said probe element and resistor while maintaining controlled pressure contact between them, and f. arc probe circuit means including an electrical power supply, said probe element and switch means for causing removal of that part of said resistor touched by said probe element.
Claim 3
Dependent Claim
62 words
The apparatus of claim 1 wherein said resistance detecting means includes both meter means for measuring the resistance of said resistor and resistance bridge network for comparing the resistance of said resistor with another resistance and wherein said switch means is responsive to said bridge network for opening said arc probe circuit when the resistance of said resistor equals said other resistance.
Claim 4
Dependent Claim
19 words
The apparatus of claim 1 further comprising g. vacuum retaining means for holding said resistor on said platform means.
Claim 5
Dependent Claim
39 words
The apparatus of claim 1 further comprising h. optical viewing means supported by said base to permit an operator to have a view of the point of contact between said probe element and said resistor while operating said apparatus.