Patent US1770805A successfully refreshed from Google Patents.
US3649503A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter etch mask
Assignee: Motorola Solutions Inc
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Filing: 1969-12-03
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Granted: 1972-03-14
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Expires: 1989-12-03
Abstract
Abstract A METAL FILM, SUCH AS TITANIUM WHICH CHEMICALLY ETCHES RELATIVELY EASILY BUT SPUTTER ETCHES RELATIVELY SLOWLY, SERVES AS A MASK IN A SPUTTER ETCHING PROCESS FOR METALS SUCH AS GOLD AND PLATINUM WHICH ARE DIFFICULT TO ETCH CHEMICALLY.
Inventors
- 👤 Lewis E Terry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 23:40
CPC Classifications
C; C23; C23F; C23F4/00; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-03-14 | 1975-09-13 | 1976-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-03-14 | 1979-09-13 | 1980-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-03-14 | 1983-09-13 | 1984-03-14 | $7700.00 | Window Closed / Lapsed |