US3645229A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotational mechanism
Assignee: International Business Machines Corp
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Filing: 1970-08-13
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Granted: 1972-02-29
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Expires: 1990-08-13
Abstract
Abstract A rotational mechanism is used, e.g., in a vacuum deposition apparatus, for suspending a substrate holder above its stationary supports for rotation free of any bearings within a heated portion of a vacuum chamber. At the beginning of the vacuum deposition cycle a shaft in the rotational mechanism is rotated to enable the mechanism to engage the substrate holder and lift it above its stationary supports due to inertia of the substrate holder. The substrate holder is then rotated during the vacuum deposition, after which the direction of rotation of the shaft is reversed, and the substrate holder is lowered onto its support member, again due to inertia, thus eliminating bearing contact among the rotational mechanism, the substrate holder, and the stationary supports during the vacuum deposition.
Inventors
- 👤 Richard R Phinney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:57
CPC Classifications
F; F16; F16H; F16H33/00; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505; F16H25/00; F16H25/18; F16H25/20; Y; Y10; Y10T; Y10T279/00; Y10T279/17; Y10T279/17923; Y10T279/17931
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
47 words
An article rotational mechanism comprising: rotatable retraction means responsive to the inertia of an article to be rotated to move the article to be rotated from an initial position, then to rotate the article, and means for coupling the article to be rotated to said retraction means.
Claim 2
Dependent Claim
47 words
An article rotational mechanism comprising: rotatable retraction means responsive to the inertia of an article to be rotated to move the article to be rotated from an initial position, then to rotate the article, and means for coupling the article to be rotated to said retraction means.
Claim 3
Dependent Claim
53 words
The apparatus of claim 1 wherein the retraction means is a nut and screw which are constrained to rotate with respect to one another by the rotational inertia of the article to be rotated to move the article to be rotated from the initial position, then which rotate together to rotate the article.
Claim 4
Dependent Claim
52 words
The apparatus of claim 1 wherein said retraction means is responsive to the rotational inertia of the rotating article when the article is rotating in a forward direction and a portion of the rotatable retraction means is rotating in a reverse direction so as to return the article to its initial position.
Claim 5
Dependent Claim
46 words
The apparatus of claim 1 wherein said means for coupling the article to be rotated to said retraction means is releasable and comprises a latch member coupled to said retraction means and a means engageable with said latch member coupled to the article to be rotated.
Claim 6
Dependent Claim
18 words
The apparatus of claim 1 additionally comprising: means tending to restrain the retraction of said rotatable retraction means.
Claim 7
Dependent Claim
63 words
An article suspension and rotation apparatus comprising: a rotatable housing; retraction means, responsive to the rotational inertia of an article to be rotated which rests on a stationary support for the article from its support, Coupled to said rotatable housing; a latch member coupled to said retraction means; and means, releasably engageable with said latch member, coupled to the article to be rotated.
Claim 8
Dependent Claim
63 words
An article suspension and rotation apparatus comprising: a rotatable housing; retraction means, responsive to the rotational inertia of an article to be rotated which rests on a stationary support for the article from its support, Coupled to said rotatable housing; a latch member coupled to said retraction means; and means, releasably engageable with said latch member, coupled to the article to be rotated.
Claim 9
Dependent Claim
48 words
The apparatus of claim 6 wherein the retraction means is a nut and screw which are constrained to rotate with respect to one another by the rotational inertia of the article to be rotated to move the article from its support, then rotate together to rotate the article.
Claim 10
Dependent Claim
51 words
The apparatus of claim 7 wherein said retraction means is responsive to the rotational inertia of the rotating article when the article is rotating in a forward direction and part of the retraction means is rotating a reverse direction so as to return the article to be rotated to its support.
Claim 11
Dependent Claim
129 words
A vacuum deposition system comprising: a vacuum chamber; a deposition material source mounted in the vacuum chamber; a substrate holder in the vacuum chamber; support means in the vacuum chamber for supporting the substrate holder; and a mechanism in said vacuum chamber for suspending and rotating the substrate holder, said mechanism having; a rotatable housing; retraction means rotatable with said rotatable housing; and releasable latch means engageable by rotation of said retraction means for coupling the substrate holder to said retraction means; said retraction means being responsive to the inertia of the article to be suspended when the rotatable housing is rotated so as to suspend the article prior to its being rotated, then rotate together with said rotatable housing so that said mechanism and substrate holder rotate together.
Claim 12
Dependent Claim
129 words
A vacuum deposition system comprising: a vacuum chamber; a deposition material source mounted in the vacuum chamber; a substrate holder in the vacuum chamber; support means in the vacuum chamber for supporting the substrate holder; and a mechanism in said vacuum chamber for suspending and rotating the substrate holder, said mechanism having; a rotatable housing; retraction means rotatable with said rotatable housing; and releasable latch means engageable by rotation of said retraction means for coupling the substrate holder to said retraction means; said retraction means being responsive to the inertia of the article to be suspended when the rotatable housing is rotated so as to suspend the article prior to its being rotated, then rotate together with said rotatable housing so that said mechanism and substrate holder rotate together.
Claim 13
Dependent Claim
33 words
A system as in claim 5 wherein said releasable latch means comprises a latch member and an engaging member; and rotation of said retraction means brings the latch and engaging members into engagement.
Claim 14
Dependent Claim
45 words
An article rotation mechanism comprising: rotating means; and retraction means having a first member rotatable by said rotating means and a second member threaded within said first member and adapted for engagement with an article having a velocity different from that of said rotating means.
Claim 15
Dependent Claim
45 words
An article rotation mechanism comprising: rotating means; and retraction means having a first member rotatable by said rotating means and a second member threaded within said first member and adapted for engagement with an article having a velocity different from that of said rotating means.
Claim 16
Dependent Claim
28 words
A mechanism as set forth in claim 11 wherein said first member is a nut and said second member is a screw adapted to cooperatively engage said nut.
Claim 17
Dependent Claim
22 words
A mechanism as set forth in claim 12 wherein said nut is adapted to slide along the axis of said rotating means.
Claim 18
Dependent Claim
15 words
A mechanism as set forth in claim 11 wherein said article is a stationary article.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-02-28 | 1975-08-30 | 1976-02-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-02-28 | 1979-08-30 | 1980-02-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-02-28 | 1983-08-30 | 1984-02-29 | $7700.00 | Window Closed / Lapsed |