US3640197A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of fine single lines and of discrete closely spaced fine lines
Assignee: Motorola Solutions Inc
•
Filing: 1970-01-22
•
Granted: 1972-02-08
•
Expires: 1990-01-22
Abstract
Abstract An apparatus is provided to produce fine single lines and discrete closely spaced fine lines by use of an opaque mask having relatively wide transparent slits or lines therein. The apparatus includes, besides the mask, a source of monochromatic light and a spacer, which may be transparent, of the correct thickness.
Inventors
- 👤 Arthur E Sanera
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 17:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70408; G03F7/70216; G03F7/7035; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
120 words
Apparatus utilizing light interference for producing at least one narrow line on a surface of an article comprising: means for directing parallel rays of monochromatic light on a mask, said mask having at least one optical slit therein, said slit being wider than said narrow line on said surface, a spacer, to provide a spacing between said mask and said surface, which has a thickness greater than the width of said narrow line on said surface, one side of said spacer being in contact with said mask and the other side of said spacer being in contact with said surface, and with said optical slit and said spacer acting to produce said narrow line on said surface by light interference.
Claim 2
Dependent Claim
120 words
Apparatus utilizing light interference for producing at least one narrow line on a surface of an article comprising: means for directing parallel rays of monochromatic light on a mask, said mask having at least one optical slit therein, said slit being wider than said narrow line on said surface, a spacer, to provide a spacing between said mask and said surface, which has a thickness greater than the width of said narrow line on said surface, one side of said spacer being in contact with said mask and the other side of said spacer being in contact with said surface, and with said optical slit and said spacer acting to produce said narrow line on said surface by light interference.
Claim 3
Dependent Claim
16 words
The invention of claim 1 in which said surface has a layer of photosensitive material thereon.
Claim 4
Dependent Claim
48 words
The invention of claim 1 in which said slit is about 2 microns wide and in which said spacer is from about one-half to about 2 microns thick, said light having a wavelength of about a third of a micron, whereby two parallel closely spaced lines are produced.
Claim 5
Dependent Claim
41 words
The invention of claim 1 in which said slit is about 2 1/2 microns wide, said spacer is about 2 1/2 microns thick, and said light has a wavelength of about 0.356 microns, whereby two parallel closely spaced lines are produced.
Claim 6
Dependent Claim
39 words
The invention of claim 1 in which said slit is about 2 1/2 microns wide, said spacer is about 5 microns thick, and said light has a wavelength of about 0.356 microns, whereby a single fine line is produced.
Claim 7
Dependent Claim
29 words
The invention of claim 1 in which said spacer is transparent with opaque material being deposited on said transparent spacer and said slit being provided in said opaque material.
Claim 8
Dependent Claim
12 words
The invention of claim 1 in which said spacer comprises separated parts.
References Cited (Backward Citations)
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US3457012A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-02-07 | 1975-08-09 | 1976-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-02-07 | 1979-08-09 | 1980-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-02-07 | 1983-08-09 | 1984-02-08 | $7700.00 | Window Closed / Lapsed |