US3638111A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for measuring ion or electron beam width by monitoring secondary emission from a moving probe
Assignee: Raytheon Co
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Filing: 1970-04-29
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Granted: 1972-01-25
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Expires: 1990-04-29
Abstract
Abstract A device for measuring and displaying selected characteristics (i.e., the intensity profile distribution, the shape and the width) of molecular and/or submolecular particle beams, such as ion or electron beams, in which the beam width may be of the order of 5 microns or less, is disclosed. The device comprises a thin wire (at least 10 mils in diameter) having a very narrow zone such as a thin groove (less than 5 microns wide) along a portion of its length. When there is relative movement between the beam and the wire so that the grooved portion of the wire is passed transversely through the beam, a secondary charged particle emission current dependent upon the beam intensity and angle of incidence with the wire surface is generated and displayed on an oscilloscope as a beam intensity profile. The width of the beam is a function of the width of that portion of the profile resulting from movement of the groove across the beam.
Inventors
- 👤 Robert M Ennis Jr
- 👤 Robert G Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:02
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/29; G01T1/16; G01T1/28
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
141 words
Apparatus for indicating selected characteristics of a beam of secondary emission current producing particles comprising: a movable member having first and second surface regions of distinguishable secondary charged particle emission characteristics for incident secondary emission current producing particles traveling in a predetermined direction and defining at least two essentially linear boundaries between said first and second regions; means coupled to said member for moving said member at an essentially uniform velocity through said beam such that each of said boundaries traverses said beam in a direction essentially transverse to the longitudinal direction of said beam and essentially transverse to the length of said boundaries; and means coupled to said member for indicating the secondary charged particle emission current resulting from the incidence of said beam on said first and second surface regions during the movement of said member through said beam.
Claim 2
Dependent Claim
141 words
Apparatus for indicating selected characteristics of a beam of secondary emission current producing particles comprising: a movable member having first and second surface regions of distinguishable secondary charged particle emission characteristics for incident secondary emission current producing particles traveling in a predetermined direction and defining at least two essentially linear boundaries between said first and second regions; means coupled to said member for moving said member at an essentially uniform velocity through said beam such that each of said boundaries traverses said beam in a direction essentially transverse to the longitudinal direction of said beam and essentially transverse to the length of said boundaries; and means coupled to said member for indicating the secondary charged particle emission current resulting from the incidence of said beam on said first and second surface regions during the movement of said member through said beam.
Claim 3
Dependent Claim
19 words
The apparatus claimeD in claim 1 wherein said movable member is a wire at least essentially 1 cm. long.
Claim 4
Dependent Claim
55 words
The apparatus claimed in claim 1 wherein the last-named means comprises an oscilloscope for displaying said secondary charged particle emission current as a waveform, the portion of said waveform resulting from impingement of said beam on said first surface region having a width representative of the width of said beam and said first surface region.
Claim 5
Dependent Claim
38 words
The apparatus claimed in claim 1 wherein the lateral surface of said member has a longitudinal groove therein which defines said first surface region, the remainder of the lateral surface of said member defining said second surface region.
Claim 6
Dependent Claim
38 words
The apparatus claimed in claim 1 wherein the lateral surface of said member has a longitudinal ridge therein which defines said first surface region, the remainder of the lateral surface of said member defining said second surface region.
Claim 7
Dependent Claim
53 words
The apparatus claimed in claim 1 wherein the lateral surface of said member has a strip of material of secondary charged particle emission characteristics distinguishable from those of said member disposed longitudinally thereon, said strip defining said first surface region and the exposed lateral surface of said member defining said second surface region.
Claim 8
Dependent Claim
29 words
The apparatus claimed in claim 1 wherein the width of said first surface region is at least essentially an order of magnitude smaller than the width of said member.
Claim 9
Dependent Claim
124 words
In apparatus for indicating selected characteristics of a beam of secondary emission current producing particles wherein a scanning member is moved at an essentially uniform velocity through said beam in a direction essentially transverse to the longitudinal direction of said beam and essentially transverse to the length of said member, and wherein the secondary charged particle emission current resulting from the incidence of said beam on said member during the movement of said member through said beam is detected, the improvement comprising a scanning member having first and second surface regions of distinguishable secondary charged particle emission characteristics for incident secondary emission current producing particles traveling in a predetermined direction and defining at least two essentially linear boundaries between said first and second regions.
Claim 10
Dependent Claim
124 words
In apparatus for indicating selected characteristics of a beam of secondary emission current producing particles wherein a scanning member is moved at an essentially uniform velocity through said beam in a direction essentially transverse to the longitudinal direction of said beam and essentially transverse to the length of said member, and wherein the secondary charged particle emission current resulting from the incidence of said beam on said member during the movement of said member through said beam is detected, the improvement comprising a scanning member having first and second surface regions of distinguishable secondary charged particle emission characteristics for incident secondary emission current producing particles traveling in a predetermined direction and defining at least two essentially linear boundaries between said first and second regions.
Claim 11
Dependent Claim
19 words
A scanning member according to claim 8 wherein said member is a wire at least essentially 1 cm. long.
Claim 12
Dependent Claim
39 words
A scanning member according to claim 8 wherein the lateral surface of said member has a longitudinal groove therein which defines said first surface region, the remainder of the lateral surface of said member defining said second surface region.
Claim 13
Dependent Claim
39 words
A scanning member according to claim 8 wherein the lateral surface of said member has a longitudinal ridge therein which defines said first surface region, the remainder of the lateral surface of said member defining said second surface region.
Claim 14
Dependent Claim
54 words
A scanning member according to claim 8 wherein the lateral surface of said member has a strip of material of secondary charged particle emission characteristics distinguishable from those of said member disposed longitudinally thereon, said strip defining said first surface region, and the exposed lateral surface of said member defining said second surface region.
Claim 15
Dependent Claim
74 words
A scanning member according to claim 8 wherein the width of said first surface region is at least essentially an order of magnitude smaller than the width of said member. Although the invention has been shown and described with reference to particular embodiments, nevertheless various changes and modifications obvious to a person skilled in the art to which the invention pertains are deemed to be within the spirit, scope, and contemplation of the invention.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-01-24 | 1975-07-26 | 1976-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-01-24 | 1979-07-26 | 1980-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-01-24 | 1983-07-26 | 1984-01-25 | $7700.00 | Window Closed / Lapsed |