US3629579A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron probe specimen stage with a scattered electron detector mounted thereon
Assignee: Hitachi Ltd
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Filing: 1970-01-16
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Granted: 1971-12-21
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Expires: 1990-01-16
Abstract
Abstract A scattered electron detection device for detecting secondary electrons and reflected electrons, characterized in that a scintillator element of the detection device is moved by means of a transferring mechanism which is movable in association with movements of a specimen stage finely movable in two directions in a horizontal plane, in such a manner that the transferring mechanism is moved following movements of the specimen stage in one of the directions but is held against movements of the specimen stage in the other direction orthogonal to said one direction.
Inventors
- 👤 Hideo Naitou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:32
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J37/244; H01J2237/00; H01J2237/244; H01J2237/2443; H01J2237/24475; H01J2237/2448; H01J2237/245; H01J2237/24507
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
144 words
An apparatus for bombarding a specimen with an electron-beam and detecting scattered electrons produced by the bombardment, comprising an electron gun; and objective electron lens for focusing an electron beam from said electron gun onto a selected area for analysis on the specimen; specimen moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimenmoving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element upon which impinge scattered electrons from said selected electron-beam irradiated area on the specimen, said scintillator element being mounted on said transferring means; and a photoelectric element for converting light produced by said scintillator element into an electric signal proportional to said light.
Claim 2
Independent Claim
144 words
An apparatus for bombarding a specimen with an electron-beam and detecting scattered electrons produced by the bombardment, comprising an electron gun; and objective electron lens for focusing an electron beam from said electron gun onto a selected area for analysis on the specimen; specimen moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimenmoving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element upon which impinge scattered electrons from said selected electron-beam irradiated area on the specimen, said scintillator element being mounted on said transferring means; and a photoelectric element for converting light produced by said scintillator element into an electric signal proportional to said light.
Claim 3
Independent Claim
165 words
An apparatus for bombarding a specimen with an electron beam and detecting scattered electrons produced by the bombardment, comprising an electron gun; an objective electron lens for focusing an electron beam from said electron gun onto a selected area for analysis of the specimen; specimen moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimen moving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element upon which impinge scattered electrons from said selected electron-beam irradiated area on the specimen, said scintillator element being mounted on said transferring means; a photoelectric element fixed at a part of a column outside the movable range of said specimen moving means; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 4
Independent Claim
165 words
An apparatus for bombarding a specimen with an electron beam and detecting scattered electrons produced by the bombardment, comprising an electron gun; an objective electron lens for focusing an electron beam from said electron gun onto a selected area for analysis of the specimen; specimen moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimen moving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element upon which impinge scattered electrons from said selected electron-beam irradiated area on the specimen, said scintillator element being mounted on said transferring means; a photoelectric element fixed at a part of a column outside the movable range of said specimen moving means; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 5
Dependent Claim
195 words
An electron probe microanalyzer comprising an electron gun; and objective electron lens for focusing an electron-beam from said electron gun onto a selected area for analysis on the specimen; sPecimen-moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimen moving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element attached to said transferring mechanism and coated on the surface thereof with a metallic membrane; means to apply a positive voltage to said scintillator element and being disposed therearound; an auxiliary electrode attached at one end of said transferring means facing said selected electron-beam irradiated area on the surface of the specimen, said auxiliary electrode producing an electric-field distribution in the area of said specimen due to said positive voltage applying means being connected thereto; a photoelectric element fixed outside the movable range of said specimen moving means; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 6
Dependent Claim
195 words
An electron probe microanalyzer comprising an electron gun; and objective electron lens for focusing an electron-beam from said electron gun onto a selected area for analysis on the specimen; sPecimen-moving means to move the specimen in two directions in a horizontal plane; transferring means responsive to movements of said specimen moving means for following the movement of said moving means in one of the two directions and for holding a fixed position thereof during movement in the other direction orthogonal to said one direction; a scintillator element attached to said transferring mechanism and coated on the surface thereof with a metallic membrane; means to apply a positive voltage to said scintillator element and being disposed therearound; an auxiliary electrode attached at one end of said transferring means facing said selected electron-beam irradiated area on the surface of the specimen, said auxiliary electrode producing an electric-field distribution in the area of said specimen due to said positive voltage applying means being connected thereto; a photoelectric element fixed outside the movable range of said specimen moving means; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 7
Dependent Claim
122 words
An electron beam apparatus comprising: an electron beam source, an electron beam condenser lens system comprising at least one condenser lens for demagnifying and focusing the electron beam from said source onto the specimen to be analyzed, specimen-mounting means carrying the specimen for movement in two directions orthogonal to each other in a plane perpendicular to said electron beam, moveable electron detector means having an electron incident surface for detecting electrons received from said specimen due to the irradiation of the electron beam, and holding means coupling movement of said electron detector means to movement of said specimen mounting means for holding said electron incident surface of said detector means and the irradiated area of the specimen in a predetermined opposing relationship.
Claim 8
Dependent Claim
122 words
An electron beam apparatus comprising: an electron beam source, an electron beam condenser lens system comprising at least one condenser lens for demagnifying and focusing the electron beam from said source onto the specimen to be analyzed, specimen-mounting means carrying the specimen for movement in two directions orthogonal to each other in a plane perpendicular to said electron beam, moveable electron detector means having an electron incident surface for detecting electrons received from said specimen due to the irradiation of the electron beam, and holding means coupling movement of said electron detector means to movement of said specimen mounting means for holding said electron incident surface of said detector means and the irradiated area of the specimen in a predetermined opposing relationship.
Claim 9
Dependent Claim
67 words
An electron beam apparatus as claimed in claim 4, wherein said electron detector means comprises a scintillator element for collecting the electrons advanced from said electron-beam irradiated area of the specimen and a photoelectric element for converting light generated by said scintillator element into electrical signals proportional to said light, and said holding means comprising means for directly connecting said detector means to said specimen mounting means.
Claim 10
Dependent Claim
162 words
An electron beam apparatus as claimed in claim 4, wherein said electron detector means comprises a scintillator element for collecting the electrons advanced from said electron-beam irradiated area of the specimen, and said holding means comprises a transferring casing member engaged at a bottom part of the last stage condenser lens of said lens system in the vicinity of said specimen mounting means, said casing member accommodating therein said scintillator element and being movable in parallel with one of said two directions of movement of said specimen mounting means, and means for movably engaging said casing member to said specimen mounting means to move said member in accordance with movement of said specimen mounting means in said one direction and to hold said member against movement of said specimen mounting means in the other direction of said two orthogonal directions; said apparatus further comprising a photoelectric element for converting light produced by said scintillator element into electrical signals proportional to said light.
Claim 11
Dependent Claim
161 words
An electron beam apparatus as claimed in claim 4, wherein said electron detector means comprises a scintillator element for collecting the electrons advanced from an electron-beam irradiated area of the specimen and a photoelectric element for converting light generated by said scintillator element into electrical signals proportional to said light; said holding means comprising a transferring casing member engaged at a bottom part of the last stage condenser lens of said lens system in the vicinity of said specimen mounting means, said casIng member accommodating therein said scintillator element and said photoelectric element and being movable in parallel with one of said two directions of movement of said specimen mounting means, and means for engaging said casing member to said specimen mounting means to move said member in accordance with movement of said specimen mounting means in said one direction and to hold said member against movement of said specimen mounting means in the other direction of said two orthogonal directions.
Claim 12
Dependent Claim
41 words
An electron beam apparatus as claimed in claim 7, further comprising a light guide composed of flexible optical fibers for conducting the light generated by said scintillator element to said photoelectric element, wherein said photoelectric element is secured to said apparatus.
Claim 13
Dependent Claim
98 words
A electron beam apparatus as claimed in claim 6, wherein said scintillator element includes a metal film coating which forms said electron incident surface of said detector means; and said detector means further comprises means to apply a first positive voltage to said scintillator element and being disposed therearound and an auxiliary electrode being fed at a second positive voltage and being attached at one end of said transferring casing member so as to oppose said electron-beam irradiated area of the specimen, said auxiliary electrode providing an electric-field distribution due to the first positive voltage of said scintillator.
Claim 14
Dependent Claim
63 words
An electron beam apparatus as claimed in claim 7, wherein said transferring casing member is located above said specimen mounting means and below said last stage condenser lens system and on a side of said specimen mounting means at a certain distance therefrom, so that said electron incident surface of said scintillator element does not directly face the irradiated area of the specimen.
Claim 15
Independent Claim
203 words
An apparatus for bombarding a specimen with an electron-beam and detecting secondary electrons generated by the bombardment: comprising an electron gun; condenser lens means for focusing the electron beam from said electron gun onto a selected area for analysis of the specimen surface, said lens means being disposed as close as possible to the specimen for shortening the focal length of the lens; a specimen stage movable in two directions perpendicular to each other in a plane perpendicular to said beam; a transferring member movably engaged to a bottom part of said condenser lens means in the vicinity of said specimen stage so as to become movable in parallel with one of said two directions; means for engaging said transferring member to said specimen stage to move said member in accordance with movement of said specimen stage in one of said two directions and to hold said member against movement of said specimen stage in the other direction; a scintillator element mounted on said transferring member for collecting incident electrons from the electron-beam irradiated area of the specimen; and a photoelectric element connected to said scintillator element for converting light produced by said scintillator element into an electric signal proportional to said light.
Claim 16
Independent Claim
203 words
An apparatus for bombarding a specimen with an electron-beam and detecting secondary electrons generated by the bombardment: comprising an electron gun; condenser lens means for focusing the electron beam from said electron gun onto a selected area for analysis of the specimen surface, said lens means being disposed as close as possible to the specimen for shortening the focal length of the lens; a specimen stage movable in two directions perpendicular to each other in a plane perpendicular to said beam; a transferring member movably engaged to a bottom part of said condenser lens means in the vicinity of said specimen stage so as to become movable in parallel with one of said two directions; means for engaging said transferring member to said specimen stage to move said member in accordance with movement of said specimen stage in one of said two directions and to hold said member against movement of said specimen stage in the other direction; a scintillator element mounted on said transferring member for collecting incident electrons from the electron-beam irradiated area of the specimen; and a photoelectric element connected to said scintillator element for converting light produced by said scintillator element into an electric signal proportional to said light.
Claim 17
Independent Claim
217 words
An apparatus for bombarding a specimen with an electron-beam and detecting secondary electrons generated by the bombardment, comprising an electron gun; condenser lens means for focusing the electron beam from said electron gun onto a selected area for analysis on the specimen surface, said lens being disposed as close to the specimen as possible for shortening the focal length of the lens; a specimen stage movable in two perpendicular directions in a plane perpendicular to said beam; transferring means movably engaged to a bottom part of said condenser lens means in the vicinity of said specimen stage so as to become movable in parallel with one of said two directions; means for engaging said transferring means to said specimen stage to move said transferring means in accordance with movement of said specimen stage in one of said two directiOns and hold said transferring means against movement of said specimen stage in the other direction; a scintillator element mounted on said transferring means for collecting incident electrons from the electron-beam irradiated area of the specimen; a photoelectric element secured on said apparatus for converting light produced by said scintillator element into an electric signal proportional to said light; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 18
Independent Claim
217 words
An apparatus for bombarding a specimen with an electron-beam and detecting secondary electrons generated by the bombardment, comprising an electron gun; condenser lens means for focusing the electron beam from said electron gun onto a selected area for analysis on the specimen surface, said lens being disposed as close to the specimen as possible for shortening the focal length of the lens; a specimen stage movable in two perpendicular directions in a plane perpendicular to said beam; transferring means movably engaged to a bottom part of said condenser lens means in the vicinity of said specimen stage so as to become movable in parallel with one of said two directions; means for engaging said transferring means to said specimen stage to move said transferring means in accordance with movement of said specimen stage in one of said two directiOns and hold said transferring means against movement of said specimen stage in the other direction; a scintillator element mounted on said transferring means for collecting incident electrons from the electron-beam irradiated area of the specimen; a photoelectric element secured on said apparatus for converting light produced by said scintillator element into an electric signal proportional to said light; and a light guide including flexible optical fibers for conducting light produced by said scintillator element to said photoelectric element.
Claim 19
Dependent Claim
87 words
An apparatus as claimed in claim 11, wherein said scintillator element is of a metal film coating which forms said electron incident surface of said detector means, further comprising means to apply a first positive voltage to said scintillator element and being disposed therearound and an auxiliary electrode being fed at a second positive voltage attached at one end of said transferring means and opposing said electron-beam irradiated area of he specimen, said auxiliary electrode providing an electric-field distribution by the first positive voltage of said scintillator.
Claim 20
Dependent Claim
117 words
An apparatus as claimed in claim 12, wherein said transferring means comprises cylindrical casing having mounting frames secured therearound and ball bearing rotary members respectively attached to the frames, and rail means attached in parallel with said one of said two directions to said bottom part of said condenser lens means and receiving therein said rotary members whereby said cylindrical casing can travel along said rail means; and said engaging means comprises a U-shaped guide member defining a guide groove and secured in parallel with said other direction to one of said frames, and a strut member disposed on a peripheral part of said specimen stage and slidably engaged in the guide groove of said U-shaped member.
References Cited (Backward Citations)
US3472997A
Cited
US3509335A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-20 | 1975-06-21 | 1975-12-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-20 | 1979-06-21 | 1979-12-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-20 | 1983-06-21 | 1983-12-21 | $7700.00 | Window Closed / Lapsed |