US3629088A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering method for deposition of silicon oxynitride
Assignee: Unisys Corp
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Filing: 1968-07-11
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Granted: 1971-12-21
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Expires: 1988-07-11
Abstract
Abstract Low temperature deposition of silicon oxynitride on an integrated circuit device is accomplished by the reactive sputtering of high-purity silicon source material in the presence of nitrous oxide and nitrogen. The deposited silicon oxynitride is characterized by an etch rate, breakdown strength and yield higher than those of silicon nitride and a dielectric constant higher than that of silicon oxide.
Inventors
- 👤 Robert I Frank
- 👤 William L Moberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/113; Y10S148/114; Y10S148/118; Y10S148/158
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
13 words
The method defined in claim 1 wherein said substrate is a semiconductor material.
Claim 2
Dependent Claim
12 words
The method defined in claim 2 wherein said semiconductor material is silicon.
Claim 3
Dependent Claim
14 words
The method defined in claim 3 wherein said silicon is coated with a metal.
Claim 4
Dependent Claim
11 words
The method defined in claim 4 wherein said metal is molybdenum.
Claim 5
Dependent Claim
16 words
The method defined in claim 5 wherein said range is from about 3 to about 5.
References Cited (Backward Citations)
US3485666A
Cited
US3422321A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-20 | 1975-06-21 | 1975-12-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-20 | 1979-06-21 | 1979-12-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-20 | 1983-06-21 | 1983-12-21 | $7700.00 | Window Closed / Lapsed |