Simultaneous photoprinting of a plurality of reduced images
Abstract
Abstract A METHOD FOR SIMULTANEOUSLY PRINTING A PLURALITY OF REDUCED IMAGES OF A PATTERN ON A PHOTOSENSITIVE MATERIAL, WHICH COMPRISES THE STEPS OF INTERPOSING AN OPTICAL FIBER PLATE BETWEEN SAID PATTERN AND PHOTOSENSITIVE MATERIAL, SAID OPTICAL FIBER PLATE BEING FORMED OF A BUNDLE OF A PLURALITY OF OPTICAL FIBERS EACH HAVING SUCH AS REFRACTIVE INDEX DISTRIBUTION IN A CROSS SECTION THEREOF AS TO SUBSTANTIALLY SATISFY THE RELATION N=N0(1-AR2) WHERE N0 REPRESENTS THE REFRACTIVE INDEX AT THE CENTER THEREOF, N REPRESENTS THE REFRACTIVE INDEX AT A RADIAL POINT AT A DISTANCE R FROM SAID CENTER POINT, AND A IS A POSITIVE CONSTANT; AND CAUSING THE TRANSMISSION A REDUCED IMAGE OF SAID PATTERN THROUGH EACH OF SAID OPTICAL FIBERS FORMING SAID OPTICAL FIBER PLATE, THEREBY AND PRODUCING THE REDUCED IMAGES ON SAID PHOTOSENSITIVE MATERIAL. USE OF THE METHOD IN THE PRODUCTION OF INTEGRATED CIRCUITS IS DISCLOSED.
Inventors
- 👤 Ichiro Kitano
Bibliographic Details
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