US3619402A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and device for depositing on surfaces
Assignee: European Atomic Energy Community Euratom
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Filing: 1968-10-11
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Granted: 1971-11-09
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Expires: 1988-10-11
Abstract
Abstract Apparatus for depositing a thin layer of a conducting or partially conducting material on the surface of a body which includes a vacuum chamber, a high-frequency coil located within the chamber for generating an electromagnetic field and means for supplying gas into the chamber in the vicinity of the electromagnetic field. A substantially tubular wall, which may be in the form of a cylinder or a truncated cone, is disposed within the high-frequency coil and electrically connected thereto. The tubular wall is slit from end to end to prevent heating by direct induction with a consequent reduction in the formation of the plasma and lowering of the efficiency of the coating operation.
Inventors
- 👤 Joseph Wurm
- 👤 Pierre Beucherie
- 👤 Michel Block
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 20:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
98 words
Apparatus for use in depositing a thin layer of conducting or partially conducting material on a surface of a body, which apparatus includes a vacuum chamber for receiving said body, a high frequency coil for generating an electromagnetic field located within said chamber and a conduit for supplying gas in the vicinity of said electromagnetic field, wherein the improvement comprises a substantially tubular wall formed of the material to be deposited and disposed within said high frequency coil, said wall being slit from end to end, and means for electrically connecting said wall to said high frequency coil.
Claim 2
Dependent Claim
39 words
Apparatus as claimed in claim 2, wherein the high-frequency coil, is made of a metal that is a good conductor, and the surface of the coil is covered with the same material as that which is to be deposited.
Claim 3
Dependent Claim
18 words
Apparatus as claimed in claim 2 wherein the wall is cylindrical and is slit along a generatrix thereof.
Claim 4
Dependent Claim
24 words
Apparatus as claimed in claim 2 wherein the wall is in the form of a truncated cone and is slit along a generatrix thereof.
Claim 5
Dependent Claim
39 words
Apparatus as claimed in claim 5, wherein the high-frequency coil, is made of a metal that is a good conductor, and the surface of the coil is covered with the same material as that which is to be deposited.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-11-08 | 1975-05-10 | 1975-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-11-08 | 1979-05-10 | 1979-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-11-08 | 1983-05-10 | 1983-11-09 | $7700.00 | Window Closed / Lapsed |