US3615937A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasticizer additive to photoresist for the reduction of pin holes
Assignee: International Business Machines Corp
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Filing: 1968-06-17
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Granted: 1971-10-26
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Expires: 1988-06-17
Abstract
Abstract A method of providing high output monolithic semiconductor devices wherein a silicon dioxide layer is coated with a photoresist material containing a highly volatile, low molecular weight, ester-type plasticizer.
Inventors
- 👤 Robert H Collins
- 👤 Frank T Deverse
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/0085; H; H10; H10W; H10W74/00; H10W74/40; H10W74/47
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
40 words
The method of claim 1 wherein said ester-type plasticizer is selected from the group consisting of dibutyl adipate, diallyl adipate, di-n-butyl maleate, diallyl maleate, dibutyl phthalate, dioctyl phthalate, butyl octyl phthalate, diethyl maleate, diethyl adipate, didecyl phthalate and mixtures thereof.
Claim 2
Dependent Claim
12 words
The method of claim 1 wherein said ester-type plasticizer is dibutyl adipate.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said photoresist material is a natural or synthetic rubber containing photoresist.
Claim 4
Dependent Claim
15 words
The method of claim 4 wherein said photoresist is a partially cyclized polyisoprene containing photoresist.
Claim 5
Dependent Claim
28 words
The method of claim 1 wherein said ester-type plasticizer is admixed with said photoresist in an amount of from about 3 percent to about 6 percent by volume.
Claim 6
Dependent Claim
32 words
The method of claim 1 wherein said plasticizer is selected from the group consisting of dialkyl phthalates, maleates, adipates and mixtures thereof, wherein each alkyl group contains up to 12 carbon atoms.
Claim 7
Dependent Claim
22 words
The method of claim 1 wherein said plasticizer is selected from the group consisting of diallyl phthalates, maleates, adipates and mixtures thereof.
Claim 8
Dependent Claim
32 words
The method of claim 1 wherein said plasticizer is selected from the group consisting of alkyl phthalates, maleates, adipates and mixtures thereof, wherein said alkyl group has up to 12 carbon atoms.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-10-25 | 1975-04-26 | 1975-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-10-25 | 1979-04-26 | 1979-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-10-25 | 1983-04-26 | 1983-10-26 | $7700.00 | Window Closed / Lapsed |