US3615873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of stabilizing mos devices
Assignee: Sprague Electric Co
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Filing: 1969-06-03
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Granted: 1971-10-26
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Expires: 1989-06-03
Abstract
Abstract The electrical properties of an MOS device are improved by subjecting the device, after the oxidation procedure is completed, to an annealing operation in an inert gas ambient. The annealing process is terminated by rapidly removing the device from the annealing ambient and placing it within a lower temperature ambient.
Inventors
- 👤 James A Sluss Jr
- 👤 Derek Cregeen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 06:03
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10D; H10D64/00; H10D64/01; H10D64/011; H10D99/00; H10P14/6322; Y; Y10; Y10S; Y10S148/00; Y10S148/003; Y10S148/053; Y10S148/06; Y10S148/118; Y10S438/00; Y10S438/91
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
27 words
The method of claim 1 wherein said boat is withdrawn from the annealing environment and placed into a boat holder, said holder being at the room temperature.
Claim 2
Dependent Claim
15 words
The Method of claim 2 wherein said boat and boat holder are composed of quartz.
Claim 3
Dependent Claim
26 words
The method of claim 3 wherein said slices lie flat on the surface of said quartz boat and are confined by projections rising from said surface.
Claim 4
Dependent Claim
43 words
The method of claim 1 wherein said slices are contained within depressions formed in the surface of a quartz boat and wherein said boat is removed to the lower temperature environment and rotated so as to tip the slices into a heat sink.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-10-25 | 1975-04-26 | 1975-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-10-25 | 1979-04-26 | 1979-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-10-25 | 1983-04-26 | 1983-10-26 | $7700.00 | Window Closed / Lapsed |