Abstract An evaporative deposition system including a chamber having means for evacuation and control of atmosphere, an evaporantretaining crucible within said chamber having a generally closed cylindrical surface with a generally centrally disposed axis, the crucible having in-turned edge surfaces at either end thereof. Means are provided for heating the crucible, with the heating means being disposed generally radially outwardly of the closed cylindrical surface. In addition, means are provided for rotating the crucible about the central axis at an arcuate rate for centrifugally maintaining evaporant adjacent the inner surface of said closed cylindrical surface, and means are provided for inserting and retaining an article to be coated within said closed cylindrical surface. The article inserting and retaining means holds the article being coated in ''''sight'''' of the evaporant, and is provided with thermal control means for controlling substrate temperature, the control means maintaining contact with an interior surface of the article being coated.
The evaporative deposition system as defined in claim 1 being particularly characterized in that said thermal control means is adapted to cool the article to be coated.
Claim 2
Dependent Claim
30 words
The evaporative deposition system as defined in claim 1 being particularly characterized in that said means for inserting and retaining the article to be coated is an expandable support collet.
Claim 3
Dependent Claim
49 words
The evaporative deposition system as defined in claim 1 being particularly characterized in that a plurality of baffles are mounted within said crucible and disposed radially outwardly of the axis thereof for controlling the radially inwardly directed flow of evaporant from the outer surfaces of said closed cylindrical surface.
Claim 4
Dependent Claim
21 words
The evaporative deposition system as defined in claim 4 being particularly characterized in that said baffles have a lenticular cross Section.
Claim 5
Dependent Claim
33 words
The evaporative deposition system as defined in claim 4 being particularly characterized in that said baffles are equally arcuately spaced, one from another, and equally radially spaced relative to said centrally disposed axis.
Claim 6
Dependent Claim
38 words
The evaporative deposition system as defined in claim 4 being particularly characterized in that said baffles are movable to effectively close the path between the inner surface of said cylindrical crucible and the outer surface of said collet.
Claim 7
Dependent Claim
61 words
The evaporative deposition system as defined in claim 1 being particularly characterized in that said means for insertion and retention of said article being coated includes means for with drawing said article from said chamber, said means for insertion and retention being in the form of a cylindrical collet having an axis arranged generally coaxially with the axis of said crucible.
Claim 8
Dependent Claim
31 words
The evaporative deposition system as defined in claim 8 being particularly characterized in that the outer surface of said collet is adapted to be cooled and maintained at a controllable temperature.
Claim 9
Dependent Claim
32 words
The evaporative deposition system as defined in claim 1 being particularly characterized in that rotary magazine means are provided for retaining individual articles to be coated prior to insertion into said crucible.