Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
273 words
In an arrangement for simultaneous interferometric measurement of two lengths by light beams, the combination comprising means producing a circularly polarized monochromatic light beam, a first beam divider into which said polarized light beam is directed and which produces one outgoing reference beam and one outgoing primary measuring beam, a second beam divider into which said primary measuring beam is directed after traversing a first one of said lengths to be measured, said second divider producing a pair of outgoing secondary measuring beams, means for respectively linearly polarizing said secondary measuring beams in mutually perpendicular planes of polarization, means for returning one of said linearly polarized secondary beams to said second beam divider, means for returning the other of said linearly polarized secondary measuring beams to said second beam divider after traversing the second of said lengths to be measured, said returning secondary beams being superimposed in said second divider and returned to said first divider as a combined measuring beam after again traversing said first length to be measured, means for returning said outgoing reference beam to said first beam divider, said returning reference beam and said combined measuring beam being superimposed in said first beam divider to form an outgoing light beam which is differently intensity modulated in two mutually perpendicular planes of polarization, a third beam divider into which said outgoing light beam is directed, said third beam divider producing a pair of outgoing modulated light beams, and a pair of photodetector devices, said photodetector devices being arranged to receive respectively the different components of the modulated light beam which are polarized in the said two different planes of polarization.
Claim 2
Dependent Claim
273 words
In an arrangement for simultaneous interferometric measurement of two lengths by light beams, the combination comprising means producing a circularly polarized monochromatic light beam, a first beam divider into which said polarized light beam is directed and which produces one outgoing reference beam and one outgoing primary measuring beam, a second beam divider into which said primary measuring beam is directed after traversing a first one of said lengths to be measured, said second divider producing a pair of outgoing secondary measuring beams, means for respectively linearly polarizing said secondary measuring beams in mutually perpendicular planes of polarization, means for returning one of said linearly polarized secondary beams to said second beam divider, means for returning the other of said linearly polarized secondary measuring beams to said second beam divider after traversing the second of said lengths to be measured, said returning secondary beams being superimposed in said second divider and returned to said first divider as a combined measuring beam after again traversing said first length to be measured, means for returning said outgoing reference beam to said first beam divider, said returning reference beam and said combined measuring beam being superimposed in said first beam divider to form an outgoing light beam which is differently intensity modulated in two mutually perpendicular planes of polarization, a third beam divider into which said outgoing light beam is directed, said third beam divider producing a pair of outgoing modulated light beams, and a pair of photodetector devices, said photodetector devices being arranged to receive respectively the different components of the modulated light beam which are polarized in the said two different planes of polarization.
Claim 3
Dependent Claim
87 words
An arrangement as defined in claim 1 for simultaneous interferometric measurement of two lengths wherein said first beam divider is constituted by a divider cube, wherein said second beam divider is constituted by a penta-prism supplemented by a prism, wherein said means for linearly polarizing said second measuring beams are constituted respectively by a lambda /4 plate, wherein said third beam divider is constituted by another divider cube, and wherein polarized filters are interposed in the beam paths between last said divider cube and said photodetector devices.
Claim 4
Dependent Claim
41 words
An arrangement as defined in claim 2 for simultaneous interferometric measurement of two lengths wherein said means for returning said linearly polarized secondary measuring beams as well as for returning said outgoing reference beam are each constituted by corner cube prisms.
Claim 5
Dependent Claim
38 words
An arrangement as defined in claim 1 for simultaneous interferometric measurement of two lengths wherein said first beam divider is constituted by a divider cube, and wherein said second and third beam dividers are constituted by Foster-Seeley prisms.