US3607477A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etchants,the treatment of moncrystalline semiconductor wafers therewith and semiconductor devices incorporating such wafers
Assignee: Siemens Mobility Ltd
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Filing: 1969-03-17
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Granted: 1971-09-21
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Expires: 1989-03-17
Abstract
Abstract This method involves the use of a solution of gluconic acid and caustic alkali to remove contaminants from a silicon wafer mounted for processing on a header.
Inventors
- 👤 Ravi Rao
- 👤 Robert I Bradshaw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 10:28
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/126; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-09-20 | 1975-03-22 | 1975-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-09-20 | 1979-03-22 | 1979-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-09-20 | 1983-03-22 | 1983-09-21 | $7700.00 | Window Closed / Lapsed |