US3604800A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High resolution contact printing
Assignee: International Business Machines Corp
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Filing: 1969-06-23
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Granted: 1971-09-14
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Expires: 1989-06-23
Abstract
Abstract Finely detailed photograph images, e.g. microcircuit patterns, made by vacuum contact exposure have improved resolution of detail. A master plate containing a mask image and a sensitized object plate are manipulated from initial positions of separation into extremely close face-to-face contact. Entrapment of air between the plates, which prevents total contact, is avoided by exhausting the space containing the plates while the plates are held discretely separated and only thereafter manipulating the plates into total contact in the exhausted space.
Inventors
- 👤 Joseph G Jordan
- 👤 Robert C Kammerzell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:36
CPC Classifications
G; G03; G03B; G03B27/00; G03B27/02; G03B27/14; G03B27/18; G03B27/20
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
73 words
In a contact printing process of obtaining high resolution radiant energy exposure of an image receiving object through a master image transparency; the steps preceding said exposure of: holding said master and object spaced apart from each other within an airtight enclosure; evacuating a portion of said enclosure including the space between said master and object; and bringing said master and object together into intimate face-toface contact while maintaining vacuum in said space.
Claim 2
Dependent Claim
73 words
In a contact printing process of obtaining high resolution radiant energy exposure of an image receiving object through a master image transparency; the steps preceding said exposure of: holding said master and object spaced apart from each other within an airtight enclosure; evacuating a portion of said enclosure including the space between said master and object; and bringing said master and object together into intimate face-toface contact while maintaining vacuum in said space.
Claim 3
Dependent Claim
96 words
In a contact printing process of obtaining high resolution radiant energy exposure of an image receiving object through a master transparency; the steps preceding said exposure of: holding said master and object spaced apart from each other within an airtight enclosure; evacuating a portion of said enclosure including the space between said master and object; bringing said master and object together into intimate face-to-face contact while maintaining vacuum in said space; and with said master and object in said intimate contact restoring pressure within said portion of said enclosure to the condition preceding the evacuating step.
Claim 4
Dependent Claim
96 words
In a contact printing process of obtaining high resolution radiant energy exposure of an image receiving object through a master transparency; the steps preceding said exposure of: holding said master and object spaced apart from each other within an airtight enclosure; evacuating a portion of said enclosure including the space between said master and object; bringing said master and object together into intimate face-to-face contact while maintaining vacuum in said space; and with said master and object in said intimate contact restoring pressure within said portion of said enclosure to the condition preceding the evacuating step.
Claim 5
Dependent Claim
27 words
The method of claim 2 with the added step of exposing said object by directing light Through a transparent lens section of said enclosure to said master.
Claim 6
Dependent Claim
26 words
The method of claim 2 with the added step of: opening a section of the enclosure providing access to said master for said radiant energy exposure.
Claim 7
Dependent Claim
148 words
Apparatus for producing photographic prints by contact printing exposure of an image receiving object element through a master transparency element comprising: means forming an airtight compartment and contact exposure fixture; means providing a conduit between the interior space of said compartment and the exterior space surrounding said compartment for selective establishment of vacuum conditions within said interior space; means adaptive to hold a pair of master and object elements within said interior compartment space separated from each other and facing each other in a parallel relation while vacuum is present in said compartment; means communicating with said holding means to allow for remote relative manipulation of said facing elements through said evacuated interior space into tight contact engagement with each other; means providing access to said interior space through said compartment forming means for radiant energy exposure of said tightly contacting elements as required in a contact-printing operation.
Claim 8
Dependent Claim
148 words
Apparatus for producing photographic prints by contact printing exposure of an image receiving object element through a master transparency element comprising: means forming an airtight compartment and contact exposure fixture; means providing a conduit between the interior space of said compartment and the exterior space surrounding said compartment for selective establishment of vacuum conditions within said interior space; means adaptive to hold a pair of master and object elements within said interior compartment space separated from each other and facing each other in a parallel relation while vacuum is present in said compartment; means communicating with said holding means to allow for remote relative manipulation of said facing elements through said evacuated interior space into tight contact engagement with each other; means providing access to said interior space through said compartment forming means for radiant energy exposure of said tightly contacting elements as required in a contact-printing operation.
Claim 9
Dependent Claim
174 words
Apparatus according to claim 5 wherein said access providing means includes a collimating lens forming a window section of said compartment forming means which is adaptive for transferring radiant exposure energy from an exterior source to said tightly contacting elements. 7 Apparatus for rapidly producing on an object plate a photographic contact print of a fine line image contained on a transparent master plate, subject to very close tolerance restrictions on dimensions of the transferred image comprising: means forming an enclosure surrounding and holding said plates in stacked face-to-face position; means for introducing a small discrete spacing between facing surfaces of said plates; means operable in coordination with said spacing means to evacuate the enclosure rapidly while said plates are held with said discrete spacing; means coordinated with said vacuum producing means for disabling the spacing means and bringing said plates together into intimate face-to-face contact soon after the enclosure becomes evacuated; and means for exposing said plates to radiant energy effective to cause image transferral from said master plate to said object plate.
Claim 10
Dependent Claim
27 words
Apparatus according to claim 7 wherein said exposing means includes a collimating lens window section for transferring said radiant energy from an external source into said enclosure.
Claim 11
Independent Claim
361 words
The apparatus for rapidly yet faithfully transferring a fine line image from a master plate to a sensitized object plate, by a contact exposure to radiant energy and with very close tolerances maintained on fidelity of the transferred image, comprising: hinged chamber forming means including first, second and third members, said first and second members, joined by a hinge, forming an outer chamber; said third member being displaceably joined to said first member by a bellows membrane and forming thereby a first inner chamber which is collapsible; said members each having at least one exhaust opening; said second and third members together forming a holding fixture for said plates and with respective said plates forming distinct second and third airtight inner chambers which are isolated from each other and from the chamber; said second member having an opening to admit external radiant energy to expose said plates; said third member having a displaceable plate holding frame with an exhaust opening, a shaft attached to said displaceable frame and extending slidably through a pressure sealed opening in said first member, and flexible means sealably connecting the exhaust opening in the displaceable frame with a said exhaust opening in the first member; means for remotely manipulating said shafT and frame of said third member relative to said first member with said first, second and third inner chambers and said outer chamber in predetermined states of evacuation, whereby if a said pair of master and object plates is supported in light contact engagement position between said second member and the holding frame of said third member and vacuum is present in the second and third inner chambers the object plate is held adjacent the third member frame and the master plate is held adjacent the second member; as a consequence of which the plates may be separated leaving a space between said plates connecting with and subject to evacuation with the outer chamber; and whereby with the outer chamber evacuated said plates can be manipulated without impedance of air into tight face-to-face contact through the evacuated space connecting with the outer chamber for contact print exposure to radiant energy under tightly controlled contact conditions.
Claim 12
Independent Claim
361 words
The apparatus for rapidly yet faithfully transferring a fine line image from a master plate to a sensitized object plate, by a contact exposure to radiant energy and with very close tolerances maintained on fidelity of the transferred image, comprising: hinged chamber forming means including first, second and third members, said first and second members, joined by a hinge, forming an outer chamber; said third member being displaceably joined to said first member by a bellows membrane and forming thereby a first inner chamber which is collapsible; said members each having at least one exhaust opening; said second and third members together forming a holding fixture for said plates and with respective said plates forming distinct second and third airtight inner chambers which are isolated from each other and from the chamber; said second member having an opening to admit external radiant energy to expose said plates; said third member having a displaceable plate holding frame with an exhaust opening, a shaft attached to said displaceable frame and extending slidably through a pressure sealed opening in said first member, and flexible means sealably connecting the exhaust opening in the displaceable frame with a said exhaust opening in the first member; means for remotely manipulating said shafT and frame of said third member relative to said first member with said first, second and third inner chambers and said outer chamber in predetermined states of evacuation, whereby if a said pair of master and object plates is supported in light contact engagement position between said second member and the holding frame of said third member and vacuum is present in the second and third inner chambers the object plate is held adjacent the third member frame and the master plate is held adjacent the second member; as a consequence of which the plates may be separated leaving a space between said plates connecting with and subject to evacuation with the outer chamber; and whereby with the outer chamber evacuated said plates can be manipulated without impedance of air into tight face-to-face contact through the evacuated space connecting with the outer chamber for contact print exposure to radiant energy under tightly controlled contact conditions.
Claim 13
Dependent Claim
34 words
The apparatus of claim 9 with: means interposed in said second member opening for transferrance of said radiant exposure energy to said plates through said second inner chamber; said means including a collimating lens.
Claim 14
Dependent Claim
35 words
The apparatus of claim 9 with: means incorporated in said second member to form closure over said opening; said means including a hinged cover plate swingable to closed and opened positions relative to said opening.
References Cited (Backward Citations)
US3521953A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-09-13 | 1975-03-15 | 1975-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-09-13 | 1979-03-15 | 1979-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-09-13 | 1983-03-15 | 1983-09-14 | $7700.00 | Window Closed / Lapsed |