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US3603042A Expired / Lapsed US ⏱️ 0.0 years remaining

Polishing machine

Assignee: Speedfam Corp
•
Filing: 1967-09-20
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Granted: 1971-09-07
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Expires: 1987-09-20
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Abstract

Abstract A polishing machine load plate unit to which workpieces are affixed for polishing, and through which fluid is directed for effecting cooling of the unit.

Inventors

  • 👤 Stephen A Boettcher

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 12:06
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/07; B24B37/10; B24B37/102; B24B55/00; B24B55/02

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 167 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit having a continuous uninterrupted lower planar surface and adapted to have workpieces affixed to the lower surface thereof for engagement with the polishing wheel assembly, and means for selectively establishing interengagement between the spindle assembly and the load plate unit, the improvement which comprises said load plate unit having an inlet spaced from said lower surface for receiving fluid, said load plate unit having passageway means entirely spaced from said lower surface in nonintersecting relation thereto and communicating with said inlet and opening outwardly of said unit to accommodate discharge of fluid from said inlet through said unit for effecting cooling thereof, and said spindle assembly having fluid transmission means for receiving fluid and transmitting the same to said inlet.
Claim 2
Dependent Claim 167 words
In a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit having a continuous uninterrupted lower planar surface and adapted to have workpieces affixed to the lower surface thereof for engagement with the polishing wheel assembly, and means for selectively establishing interengagement between the spindle assembly and the load plate unit, the improvement which comprises said load plate unit having an inlet spaced from said lower surface for receiving fluid, said load plate unit having passageway means entirely spaced from said lower surface in nonintersecting relation thereto and communicating with said inlet and opening outwardly of said unit to accommodate discharge of fluid from said inlet through said unit for effecting cooling thereof, and said spindle assembly having fluid transmission means for receiving fluid and transmitting the same to said inlet.
Claim 3
Dependent Claim 26 words
The improvement of claim 1 wherein said load plate unit is comprised of two plate sections secured together in spaced relation to define said passageway means.
Claim 4
Dependent Claim 66 words
The improvement of claim 1 wherein said spindle assembly includes a lower section that projects into said inlet, and said fluid transmission means is defined by a central axial opening in said spindle assembly which communicates with said inlet and a radial opening in said spindle assembly which communicates with said axial opening and is adapted to be connected to a source of fluid under pressure.
Claim 5
Dependent Claim 61 words
The improvement of claim 3 wherein said load plate unit is comprised of upper and lower plate sections secured together in spaced relation to define said passageway means, said inlet is defined by a central axial opening in said upper plate section, and said lower section of said spindle assembly is received in said axial opening in said upper plate section.
Claim 6
Dependent Claim 41 words
The improvement of claim 4 wherein the fluid under pressure is a gas, and said upper and lower plate sections are spaced apart a predetermined distance to permit expansion of the gas as the latter is discharged through said passageway means.
Claim 7
Dependent Claim 77 words
The improvement of claim 1 wherein said interengagement means is comprised of swivel connection means, said spindle assembly includes a spindle and a tube secured axially therein and defining in part said fluid transmission means, said tube is arranged with the lower end thereof communicating with said inlet, and said spindle is formed with an annular clearance surrounding a portion of said tube to permit the latter to flex during swivel movement of said load plate unit.
Claim 8
Dependent Claim 83 words
For use in a polishing machine, a circular load plate unit having a continuous uninterrupted planar surface at one side thereof to which workpieces may be affixed, having an inlet which opens axially at the other side of said unit for receiving fluid, and having passageway means entirely spaced from said planar surface in nonintersecting relation thereto and communicating with said inlet and opening outwardly of said unit to accommodate discharge of fluid from said inlet through said unit for effecting cooling thereof.
Claim 9
Dependent Claim 83 words
For use in a polishing machine, a circular load plate unit having a continuous uninterrupted planar surface at one side thereof to which workpieces may be affixed, having an inlet which opens axially at the other side of said unit for receiving fluid, and having passageway means entirely spaced from said planar surface in nonintersecting relation thereto and communicating with said inlet and opening outwardly of said unit to accommodate discharge of fluid from said inlet through said unit for effecting cooling thereof.
Claim 10
Dependent Claim 27 words
A load plate unit as set forth in claim 7 which is comprised of two plate sections secured together in spaced relation to define said passageway means.
Claim 11
Dependent Claim 46 words
A load plate unit as set forth in claim 8 which is adapted for use with a gas under pressure, and wherein said plate sections are spaced apart a predetermined distance to permit expansion of the gas as the latter is discharged through said passageway means.

References Cited (Backward Citations)

US2733562A Cited
US2687603A Cited
US2869294A Cited
US3032937A Cited
US3093937A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-09-06 1975-03-08 1975-09-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-09-06 1979-03-08 1979-09-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-09-06 1983-03-08 1983-09-07 $7700.00 Window Closed / Lapsed

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