US3602710A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Atom probe field microscope having means for separating the ions according to mass
Assignee: Research Corp
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Filing: 1969-05-07
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Granted: 1971-08-31
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Expires: 1989-05-07
Abstract
Abstract A field ion microscope capable of isolating and analyzing one or a few atoms of a specimen comprises a field ion microscope section including an emitter tip mounting the specimen to be examined, an apertured screen in the path of the beam of ions emitted by the specimen and means for adjusting the path traversed by the ion beam with respect to the aperture in the screen to cause a selected area of the beam to pass through the aperture and an ion detector positioned in the path of ions passing through the aperture. The path of the ion beam emitted by the specimen by the application of a high voltage may be altered by beam-deflecting means adjacent the beam path or by varying the angular disposition of the emitter tip with respect to the image screen, or the beam may be allowed to drift through a long tube and measured in its time-of-flight in each case using a detector of single particle sensitivity.
Inventors
- 👤 Erwin W Mueller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:50
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/26; H01J49/28; H01J49/30; H01J37/00; H01J37/02; H01J37/04; H01J37/05; H01J37/26; H01J37/285
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
123 words
An atom-probe field ion microscope comprising a microscope section including an emitter tip mounting a specimen to be examined, means for introducing an ionizable gas into the section, an image screen in the path of the beam of ions emitted by the specimen apertured to pass the image of a single atom of the emitter tip, means for adjusting the path traversed by the beam with respect to he aperture in the screen to cause a selected area of the beam to pass through the aperture and means for increasing the electrical field strength at the emitter tip to effect emission of ionized atoms of the emitter tip material and an ion detector positioned in the path of ions passing through the aperture.
Claim 2
Dependent Claim
123 words
An atom-probe field ion microscope comprising a microscope section including an emitter tip mounting a specimen to be examined, means for introducing an ionizable gas into the section, an image screen in the path of the beam of ions emitted by the specimen apertured to pass the image of a single atom of the emitter tip, means for adjusting the path traversed by the beam with respect to he aperture in the screen to cause a selected area of the beam to pass through the aperture and means for increasing the electrical field strength at the emitter tip to effect emission of ionized atoms of the emitter tip material and an ion detector positioned in the path of ions passing through the aperture.
Claim 3
Dependent Claim
35 words
An atom-probe field ion microscope as defined in claim 1 including paired deflector electrodes adjacent the path of the ion beam emitted by the specimen for varying the direction of travel of the ion beam.
Claim 4
Dependent Claim
37 words
An atom-probe field ion microscope as defined in claim 1 wherein the mounting means for the emitter tip includes a flexible bellows for varying the angular position of the emitter tip with respect to the apertured screen.
Claim 5
Dependent Claim
41 words
An atom-probe field ion microscope as defined in claim 1 including an ion detector channel detecting ions of gas atoms ionized at the emitter tip and at least one further channel detecting ions of desorbed specimen atoms passing through the aperture.
Claim 6
Dependent Claim
43 words
An atom-probe field ion microscope as defined in claim 1 including means establishing a magnetic field transversely of the path of ions passing through the aperture and at least one ion detector channel in the path of ions deflected by the magnetic field.
Claim 7
Dependent Claim
29 words
An atom-probe field ion microscope as defined in claim 1 including means for pulsing the field on the emitter tip to effect the desorption of atoms from the specimen.
Claim 8
Dependent Claim
39 words
An atom-probe field ion microscope as defined in claim 6 including means for relating the time of a pulse and the time of detection of an atom desorbed by such pulse to determine the e/m ratio of such atom.
Claim 9
Dependent Claim
25 words
An atom-probe field ion microscope as defined in claim 1 including means for altering the size, shape or location of the effective beam limiting aperture.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-30 | 1975-03-01 | 1975-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-30 | 1979-03-01 | 1979-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-30 | 1983-03-01 | 1983-08-31 | $7700.00 | Window Closed / Lapsed |