US3597609A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of image focusing in particle-beam apparatus comprising changing the beam incidence angle at 10 to 15 hertz
Assignee: Siemens AG
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Filing: 1969-08-28
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Granted: 1971-08-03
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Expires: 1989-08-28
Abstract
Abstract A method of focusing the image of a beam-transmissive specimen formed by the electrooptical lens system in a particle-beam apparatus equipped with beam deflectors including imaging the specimen on an image plane and varying the direction of incidence of the beam upon the specimen periodically by electrically exciting the beam deflectors at a frequency of from 10 to 15 Hz. The image is observed and the excitation of at least one of the lenses comprising the lens system is adjusted to focus the image while the direction of the beam is varied.
Inventors
- 👤 Klaus Anger
- 👤 Dieter Braun
- 👤 Fred Fox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/21
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
98 words
The method of focusing the image of a beam transmissive specimen formed by an electro-optical lens system in a particlebeam apparatus equipped with beam deflection means, which comprises imaging the specimen on an image plane, varying the direction of incidence of the beam upon the specimen periodically by electrically exciting the beam deflection means at a frequency of from 10 to 15 Hz. thereby producing a flickering image, observing the image and adjusting the excitation of at least one of the lenses of the lens system to focus the image while the direction of the beam is varied.
Claim 2
Independent Claim
98 words
The method of focusing the image of a beam transmissive specimen formed by an electro-optical lens system in a particlebeam apparatus equipped with beam deflection means, which comprises imaging the specimen on an image plane, varying the direction of incidence of the beam upon the specimen periodically by electrically exciting the beam deflection means at a frequency of from 10 to 15 Hz. thereby producing a flickering image, observing the image and adjusting the excitation of at least one of the lenses of the lens system to focus the image while the direction of the beam is varied.
Claim 3
Dependent Claim
31 words
The method according to claim 1, which comprises the additional step of adjusting the excitation of a stigmator included in said lens system while the direction of said beam is varied.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-02 | 1975-02-01 | 1975-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-02 | 1979-02-01 | 1979-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-02 | 1983-02-01 | 1983-08-03 | $7700.00 | Window Closed / Lapsed |