US3597289A
Expired / Lapsed
US
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Method of etching a semiconductor body
Assignee: Licentia Patent Verwaltungs GmbH
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Filing: 1967-01-19
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Granted: 1971-08-03
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Expires: 1987-01-19
Abstract
Abstract A SEMICONDUCTOR BODY IS ETCHED BY APPLYING A CONTINUOUS STREAM OF ETCHING FLUID, A CONTINUOUS STREAM OF RINSING FLUID, AND A CONTINUOUS STREAM OF GAS TO THE SEMICODUCTOR BODY FROM THREE SPACED NOZZLES WHILE THE SEMICONDUCTOR BODY IS REPEATEDLY MOVED PAST THE NOZZLES.
Inventors
- 👤 Gunter Kohl
- 👤 Werner Heidrich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 11:22
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; Y; Y10; Y10S; Y10S148/00; Y10S148/054
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-02 | 1975-02-01 | 1975-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-02 | 1979-02-01 | 1979-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-02 | 1983-02-01 | 1983-08-03 | $7700.00 | Window Closed / Lapsed |