US3589953A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor diffusion system for semiconductors
Assignee: Motors Liquidation Co
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Filing: 1968-02-14
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Granted: 1971-06-29
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Expires: 1988-02-14
Abstract
Abstract AN IMPROVED SYSTEM FOR VAPOR DIFFUSING A CONDUCTIVITYTYPE DETERMINING IMPURITY INTO A PLURALITY OF SEMICONDUCTOR BODIES SIMULTANEOUSLY. THE SEMICONDUCTOR BODIES AND A SOURCE OF IMPURITY ARE PLACED WITHIN A CLOSED BUT UNSEALED HEAT INSULATED ENCLOSURE WITHIN A VACUUM CHAM- BER. HEAT IS GENERATED AND MAINTAINED WITHIN THE ENCLOSURE TO ESTABLISH AN ATMOSPHERE OF IMPURITY VAPOR THEREWITHIN TO EFFECT DIFFUSION.
Inventors
- 👤 Dillon R Traxler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:56
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/16; C30B31/165; C30B31/10; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S118/00; Y10S118/90; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-28 | 1974-12-28 | 1975-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-28 | 1978-12-28 | 1979-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-28 | 1982-12-28 | 1983-06-29 | $7700.00 | Window Closed / Lapsed |